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|---|---|---|
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| 0001101302-26-000150-index.html | 2026-08-04 16:03:02 | |
| 0001101302-26-000150.txt | 2026-08-04 16:03:02 | |
 0001101302-26-000150-xbrl.zip | 261438 | 2026-08-04 16:03:02 |
| entg-20260627.htm | 1571655 | 2026-08-04 16:03:02 |
| entg-20260627.xsd | 32966 | 2026-08-04 16:03:02 |
| entg-20260627xex104.htm | 109688 | 2026-08-04 16:03:02 |
| entg-20260627xex105.htm | 86386 | 2026-08-04 16:03:02 |
| entg-20260627xex106.htm | 94789 | 2026-08-04 16:03:02 |
| entg-20260627xex311.htm | 8945 | 2026-08-04 16:03:02 |
| entg-20260627xex312.htm | 8957 | 2026-08-04 16:03:02 |
| entg-20260627xex321.htm | 5409 | 2026-08-04 16:03:02 |
| entg-20260627_cal.xml | 77934 | 2026-08-04 16:03:02 |
| entg-20260627_def.xml | 134364 | 2026-08-04 16:03:02 |
 entg-20260627_g1.jpg | 42851 | 2026-08-04 16:03:02 |
| entg-20260627_htm.xml | 1291395 | 2026-08-04 16:03:02 |
| entg-20260627_lab.xml | 500323 | 2026-08-04 16:03:02 |
| entg-20260627_pre.xml | 343430 | 2026-08-04 16:03:02 |
| FilingSummary.xml | 31106 | 2026-08-04 16:03:02 |
| MetaLinks.json | 853455 | 2026-08-04 16:03:02 |
| R1.htm | 51525 | 2026-08-04 16:03:02 |
| R10.htm | 13517 | 2026-08-04 16:03:02 |
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| R2.htm | 142847 | 2026-08-04 16:03:02 |
| R20.htm | 5811 | 2026-08-04 16:03:02 |
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| R27.htm | 35168 | 2026-08-04 16:03:02 |
| R28.htm | 20349 | 2026-08-04 16:03:02 |
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| R32.htm | 80306 | 2026-08-04 16:03:02 |
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| R8.htm | 4957 | 2026-08-04 16:03:02 |
| R9.htm | 109866 | 2026-08-04 16:03:02 |
| report.css | 2767 | 2026-08-04 16:03:02 |
| Show.js | 1085 | 2026-08-04 16:03:02 |