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|---|---|---|
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| 0001101302-24-000040-index.html | 2024-05-01 16:50:47 | |
| 0001101302-24-000040.txt | 2024-05-01 16:50:47 | |
 0001101302-24-000040-xbrl.zip | 229692 | 2024-05-01 16:50:47 |
| entg-20240330.htm | 1186211 | 2024-05-01 16:50:47 |
| entg-20240330.xsd | 35921 | 2024-05-01 16:50:47 |
| entg-20240330xex311.htm | 8987 | 2024-05-01 16:50:47 |
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| R1.htm | 51554 | 2024-05-01 16:50:47 |
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| report.css | 2767 | 2024-05-01 16:50:47 |
| Show.js | 1085 | 2024-05-01 16:50:47 |