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| 0001047469-13-002045-index.html | 2013-03-01 13:44:06 | |
| 0001047469-13-002045.txt | 2013-03-01 13:44:06 | |
 0001047469-13-002045-xbrl.zip | 197750 | 2013-03-01 13:44:06 |
| a2213243z10-k.htm | 960642 | 2013-03-01 13:44:06 |
| a2213243zex-10_12.htm | 11143 | 2013-03-01 13:44:06 |
| a2213243zex-10_13.htm | 11844 | 2013-03-01 13:44:06 |
| a2213243zex-10_17.htm | 7177 | 2013-03-01 13:44:06 |
| a2213243zex-21_1.htm | 5423 | 2013-03-01 13:44:06 |
| a2213243zex-23_1.htm | 3935 | 2013-03-01 13:44:06 |
| a2213243zex-31_1.htm | 8030 | 2013-03-01 13:44:06 |
| a2213243zex-31_2.htm | 7670 | 2013-03-01 13:44:06 |
| a2213243zex-32_1.htm | 3985 | 2013-03-01 13:44:06 |
| a2213243zex-32_2.htm | 4347 | 2013-03-01 13:44:06 |
| acls-20121231.xml | 1093465 | 2013-03-01 13:44:06 |
| acls-20121231.xsd | 67528 | 2013-03-01 13:44:06 |
| acls-20121231_cal.xml | 102491 | 2013-03-01 13:44:06 |
| acls-20121231_def.xml | 262395 | 2013-03-01 13:44:06 |
| acls-20121231_lab.xml | 1129996 | 2013-03-01 13:44:06 |
| acls-20121231_pre.xml | 549814 | 2013-03-01 13:44:06 |
| FilingSummary.xml | 37828 | 2013-03-01 13:44:06 |
| Financial_Report.xls | 994168 | 2013-03-01 13:44:06 |
| R1.htm | 37253 | 2013-03-01 13:44:06 |
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| report.css | 2721 | 2013-03-01 13:44:06 |
| Show.js | 6423 | 2013-03-01 13:44:06 |