Inventories, Net (Details) (USD $)	3 Months Ended	12 Months Ended
	Dec. 31, 2012	Dec. 31, 2012	Dec. 31, 2011	Dec. 31, 2010
Inventories, net
Raw materials	$ 72,013,000	$ 72,013,000	$ 85,829,000
Work in process	12,253,000	12,253,000	25,639,000
Finished goods (completed systems)	15,968,000	15,968,000	8,555,000
Inventories, net	100,234,000	100,234,000	120,023,000
Inventory reserves	33,600,000	33,600,000	22,800,000
Reserves
Cost of sales due to below normal production capacity		2,600,000		1,000,000
Inventory reserves
Reserves
Increase in inventory reserves	$ 13,400,000	$ 14,492,000	$ 1,015,000	$ 2,015,000