Schedule II-Valuation and Qualifying Accounts

12 Months Ended

Dec. 31, 2012

Schedule II-Valuation and Qualifying Accounts

Schedule II-Valuation and Qualifying Accounts

Schedule II—Valuation and Qualifying Accounts Axcelis Technologies, Inc. (In thousands)

Schedule II—Valuation and Qualifying Accounts
Axcelis Technologies, Inc.
(In thousands)

	Balance at Beginning of Period		Charged to Costs and Expenses			Deductions			Other(*)			Balance at End of Period
Year Ended December 31, 2012
Allowance for doubtful accounts and returns	$	411	$	—		$	(112	)	$	6		$	305
Reserve for excess and obsolete inventory		22,778		14,492			(4,819	)		1,150			33,601
Year Ended December 31, 2011
Allowance for doubtful accounts and returns	$	1,357	$	(535	)	$	(449	)	$	38		$	411
Reserve for excess and obsolete inventory		27,517		1,015			(5,583	)		(171	)		22,778
Year Ended December 31, 2010
Allowance for doubtful accounts and returns	$	2,390	$	(1,120	)	$	(17	)	$	104		$	1,357
Reserve for excess and obsolete inventory		36,980		2,015			(11,224	)		(254	)		27,517

(*)

Represents foreign currency translation adjustments.