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Business Segment and Geographic Region Information (Tables)
12 Months Ended
Dec. 31, 2012
Business Segment and Geographic Region Information  
Schedule of revenue by product lines

 

 

 
  Years ended December 31,  
 
  2012   2011   2010  
 
  (in thousands)
 

Ion implantation systems, services, and royalties

  $ 156,090   $ 237,857   $ 232,335  

Other systems and services

    47,295     81,559     42,877  
               

 

  $ 203,385   $ 319,416   $ 275,212  
               

  

Schedule of revenue and long-lived assets by geographic region

 

 
  Revenue   Long-Lived
Assets
 
 
  (in thousands)
 

2012

             

United States

  $ 132,159   $ 43,440  

Europe

    27,636      

Asia Pacific

    43,590     752  
           

 

  $ 203,385   $ 44,192  
           

2011

             

United States

  $ 234,132   $ 54,472  

Europe

    31,505      

Asia Pacific

    53,779     996  
           

 

  $ 319,416   $ 55,468  
           

2010

             

United States

  $ 190,819   $ 50,532  

Europe

    33,822      

Asia Pacific

    50,571     442  
           

 

  $ 275,212   $ 50,974