Inventories, net (Tables)

12 Months Ended

Dec. 31, 2012

Inventories, net

Schedule of components of inventories

	December 31,
	2012		2011
	(in thousands)
Raw materials	$	72,013	$	85,829
Work in process		12,253		25,639
Finished goods (completed systems)		15,968		8,555
	$	100,234	$	120,023