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| 0001101302-23-000089.txt | 2023-11-02 16:30:03 | |
 0001101302-23-000089-xbrl.zip | 286286 | 2023-11-02 16:30:03 |
| entg-20230930.htm | 1949712 | 2023-11-02 16:30:03 |
| entg-20230930.xsd | 42065 | 2023-11-02 16:30:03 |
| entg-20230930xex311.htm | 8992 | 2023-11-02 16:30:03 |
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| entg-20230930xex321.htm | 5342 | 2023-11-02 16:30:03 |
| entg-20230930_cal.xml | 84500 | 2023-11-02 16:30:03 |
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| entg-20230930_htm.xml | 1633209 | 2023-11-02 16:30:03 |
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| FilingSummary.xml | 38958 | 2023-11-02 16:30:03 |
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| report.css | 2767 | 2023-11-02 16:30:03 |
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