Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-22-000010-index-headers.html | 2022-02-04 17:03:05 | |
| 0001101302-22-000010-index.html | 2022-02-04 17:03:05 | |
| 0001101302-22-000010.txt | 2022-02-04 17:03:05 | |
 0001101302-22-000010-xbrl.zip | 653692 | 2022-02-04 17:03:05 |
| entg-12312021xex21.htm | 22359 | 2022-02-04 17:03:05 |
| entg-12312021xex23.htm | 2335 | 2022-02-04 17:03:05 |
| entg-12312021xex24.htm | 12439 | 2022-02-04 17:03:05 |
| entg-12312021xex311.htm | 9290 | 2022-02-04 17:03:05 |
| entg-12312021xex312.htm | 9282 | 2022-02-04 17:03:05 |
| entg-12312021xex321.htm | 4845 | 2022-02-04 17:03:05 |
| entg-12312021xex322.htm | 4860 | 2022-02-04 17:03:05 |
| entg-20211231.htm | 3138067 | 2022-02-04 17:03:05 |
| entg-20211231.xsd | 66132 | 2022-02-04 17:03:05 |
| entg-20211231_cal.xml | 114156 | 2022-02-04 17:03:05 |
| entg-20211231_def.xml | 364245 | 2022-02-04 17:03:05 |
 entg-20211231_g1.jpg | 42851 | 2022-02-04 17:03:05 |
 entg-20211231_g2.jpg | 137487 | 2022-02-04 17:03:05 |
| entg-20211231_htm.xml | 2842998 | 2022-02-04 17:03:05 |
| entg-20211231_lab.xml | 883399 | 2022-02-04 17:03:05 |
| entg-20211231_pre.xml | 641936 | 2022-02-04 17:03:05 |
| exhibit101-performanceshar.htm | 55974 | 2022-02-04 17:03:05 |
| exhibit102-rsuawardagreeme.htm | 44813 | 2022-02-04 17:03:05 |
| exhibit103-stockoptiongran.htm | 44629 | 2022-02-04 17:03:05 |
| exhibit104.htm | 36887 | 2022-02-04 17:03:05 |
| FilingSummary.xml | 61488 | 2022-02-04 17:03:05 |
| Financial_Report.xlsx | 152390 | 2022-02-04 17:03:05 |
| MetaLinks.json | 930377 | 2022-02-04 17:03:05 |
| R1.htm | 66789 | 2022-02-04 17:03:05 |
| R10.htm | 14344 | 2022-02-04 17:03:05 |
| R100.htm | 23387 | 2022-02-04 17:03:05 |
| R101.htm | 106101 | 2022-02-04 17:03:05 |
| R102.htm | 20989 | 2022-02-04 17:03:05 |
| R103.htm | 9423 | 2022-02-04 17:03:05 |
| R104.htm | 43118 | 2022-02-04 17:03:05 |
| R11.htm | 69749 | 2022-02-04 17:03:05 |
| R12.htm | 12694 | 2022-02-04 17:03:05 |
| R13.htm | 11630 | 2022-02-04 17:03:05 |
| R14.htm | 25372 | 2022-02-04 17:03:05 |
| R15.htm | 63858 | 2022-02-04 17:03:05 |
| R16.htm | 62718 | 2022-02-04 17:03:05 |
| R17.htm | 16844 | 2022-02-04 17:03:05 |
| R18.htm | 37029 | 2022-02-04 17:03:05 |
| R19.htm | 14567 | 2022-02-04 17:03:05 |
| R2.htm | 112765 | 2022-02-04 17:03:05 |
| R20.htm | 92119 | 2022-02-04 17:03:05 |
| R21.htm | 105067 | 2022-02-04 17:03:05 |
| R22.htm | 102688 | 2022-02-04 17:03:05 |
| R23.htm | 15525 | 2022-02-04 17:03:05 |
| R24.htm | 170265 | 2022-02-04 17:03:05 |
| R25.htm | 6368 | 2022-02-04 17:03:05 |
| R26.htm | 30626 | 2022-02-04 17:03:05 |
| R27.htm | 5022 | 2022-02-04 17:03:05 |
| R28.htm | 75672 | 2022-02-04 17:03:05 |
| R29.htm | 11605 | 2022-02-04 17:03:05 |
| R3.htm | 20373 | 2022-02-04 17:03:05 |
| R30.htm | 66249 | 2022-02-04 17:03:05 |
| R31.htm | 12780 | 2022-02-04 17:03:05 |
| R32.htm | 12643 | 2022-02-04 17:03:05 |
| R33.htm | 26400 | 2022-02-04 17:03:05 |
| R34.htm | 68850 | 2022-02-04 17:03:05 |
| R35.htm | 40371 | 2022-02-04 17:03:05 |
| R36.htm | 15193 | 2022-02-04 17:03:05 |
| R37.htm | 41623 | 2022-02-04 17:03:05 |
| R38.htm | 13408 | 2022-02-04 17:03:05 |
| R39.htm | 91965 | 2022-02-04 17:03:05 |
| R4.htm | 80121 | 2022-02-04 17:03:05 |
| R40.htm | 97731 | 2022-02-04 17:03:05 |
| R41.htm | 112029 | 2022-02-04 17:03:05 |
| R42.htm | 17376 | 2022-02-04 17:03:05 |
| R43.htm | 170391 | 2022-02-04 17:03:05 |
| R44.htm | 30370 | 2022-02-04 17:03:05 |
| R45.htm | 8149 | 2022-02-04 17:03:05 |
| R46.htm | 9367 | 2022-02-04 17:03:05 |
| R47.htm | 7325 | 2022-02-04 17:03:05 |
| R48.htm | 52283 | 2022-02-04 17:03:05 |
| R49.htm | 7054 | 2022-02-04 17:03:05 |
| R5.htm | 28386 | 2022-02-04 17:03:05 |
| R50.htm | 44936 | 2022-02-04 17:03:05 |
| R51.htm | 55897 | 2022-02-04 17:03:05 |
| R52.htm | 16178 | 2022-02-04 17:03:05 |
| R53.htm | 13063 | 2022-02-04 17:03:05 |
| R54.htm | 4488 | 2022-02-04 17:03:05 |
| R55.htm | 45610 | 2022-02-04 17:03:05 |
| R56.htm | 4953 | 2022-02-04 17:03:05 |
| R57.htm | 22116 | 2022-02-04 17:03:05 |
| R58.htm | 7621 | 2022-02-04 17:03:05 |
| R59.htm | 23628 | 2022-02-04 17:03:05 |
| R6.htm | 60106 | 2022-02-04 17:03:05 |
| R60.htm | 5435 | 2022-02-04 17:03:05 |
| R61.htm | 17792 | 2022-02-04 17:03:05 |
| R62.htm | 25612 | 2022-02-04 17:03:05 |
| R63.htm | 21239 | 2022-02-04 17:03:05 |
| R64.htm | 12692 | 2022-02-04 17:03:05 |
| R65.htm | 50962 | 2022-02-04 17:03:05 |
| R66.htm | 36742 | 2022-02-04 17:03:05 |
| R67.htm | 37833 | 2022-02-04 17:03:05 |
| R68.htm | 18255 | 2022-02-04 17:03:05 |
| R69.htm | 20738 | 2022-02-04 17:03:05 |
| R7.htm | 4651 | 2022-02-04 17:03:05 |
| R70.htm | 4943 | 2022-02-04 17:03:05 |
| R71.htm | 17416 | 2022-02-04 17:03:05 |
| R72.htm | 20984 | 2022-02-04 17:03:05 |
| R73.htm | 13657 | 2022-02-04 17:03:05 |
| R74.htm | 12421 | 2022-02-04 17:03:05 |
| R75.htm | 28589 | 2022-02-04 17:03:05 |
| R76.htm | 30041 | 2022-02-04 17:03:05 |
| R77.htm | 14854 | 2022-02-04 17:03:05 |
| R78.htm | 36426 | 2022-02-04 17:03:05 |
| R79.htm | 21805 | 2022-02-04 17:03:05 |
| R8.htm | 114323 | 2022-02-04 17:03:05 |
| R80.htm | 15465 | 2022-02-04 17:03:05 |
| R81.htm | 19215 | 2022-02-04 17:03:05 |
| R82.htm | 28641 | 2022-02-04 17:03:05 |
| R83.htm | 41008 | 2022-02-04 17:03:05 |
| R84.htm | 13959 | 2022-02-04 17:03:05 |
| R85.htm | 24933 | 2022-02-04 17:03:05 |
| R86.htm | 16520 | 2022-02-04 17:03:05 |
| R87.htm | 90496 | 2022-02-04 17:03:05 |
| R88.htm | 10889 | 2022-02-04 17:03:05 |
| R89.htm | 38065 | 2022-02-04 17:03:05 |
| R9.htm | 31213 | 2022-02-04 17:03:05 |
| R90.htm | 8622 | 2022-02-04 17:03:05 |
| R91.htm | 10250 | 2022-02-04 17:03:05 |
| R92.htm | 10408 | 2022-02-04 17:03:05 |
| R93.htm | 27009 | 2022-02-04 17:03:05 |
| R94.htm | 14220 | 2022-02-04 17:03:05 |
| R95.htm | 15666 | 2022-02-04 17:03:05 |
| R96.htm | 16727 | 2022-02-04 17:03:05 |
| R97.htm | 9727 | 2022-02-04 17:03:05 |
| R98.htm | 4996 | 2022-02-04 17:03:05 |
| R99.htm | 54271 | 2022-02-04 17:03:05 |
| report.css | 2768 | 2022-02-04 17:03:05 |
| Show.js | 1086 | 2022-02-04 17:03:05 |