Acquisition - Sinmat (Details) - USD ($) $ in Thousands		6 Months Ended	12 Months Ended
	Jan. 10, 2020	Jul. 03, 2021	Dec. 31, 2021	Dec. 31, 2020	Dec. 31, 2019
Business Acquisition
Goodwill			$ 793,702	$ 748,037	$ 695,044
Total purchase price, net of cash acquired			$ 91,942	111,912	$ 277,369
Sinmat Acquisition
Business Acquisition
Trade accounts and note receivable, net	$ 1,189	$ 1,189
Inventories, net	1,010	1,010
Other current assets	8	8
Property, plant and equipment	63	63
Identifiable intangible assets	41,680	41,680
Right-of-use assets	1,712	1,712
Business Combination Recognized Identifiable Assets Acquired and Liabilities Assumed, Deferred Tax Assets	0	102
Accounts payable and accrued liabilities	(58)	(58)
Short-term lease liability	(150)	(150)
Long-term lease liability	(1,562)	(1,562)
Net Assets Acquired	43,892	43,994
Goodwill	31,751	31,651
Total purchase price, net of cash acquired	75,643	$ 75,645
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life		13 years 6 months
Total purchase price, net of cash acquired	75,600
Payments to Acquire Businesses, Gross	$ 76,200
Acquisition costs				$ 700
Business Acquisition, Date of Acquisition Agreement	Jan. 10, 2020
Sinmat Acquisition | Developed Technology
Business Acquisition
Identifiable intangible assets		$ 7,650
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life		7 years
Sinmat Acquisition | Trademarks and Trade names
Business Acquisition
Identifiable intangible assets		$ 130
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life		1 year 3 months 18 days
Sinmat Acquisition | Customer Relationships
Business Acquisition
Identifiable intangible assets		$ 33,900
Acquired Finite-lived Intangible Assets, Weighted Average Useful Life		15 years