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Pending Acquisition (Details) - USD ($)
$ in Thousands
12 Months Ended
Dec. 14, 2021
Dec. 31, 2021
Dec. 31, 2020
Dec. 31, 2019
Business Acquisition        
Total purchase price, net of cash acquired   $ 91,942 $ 111,912 $ 277,369
CMC Materials        
Business Acquisition        
Total purchase price, net of cash acquired $ 6,500,000