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|---|---|---|
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| 0001101302-22-000050-index.html | 2022-11-02 17:14:57 | |
| 0001101302-22-000050.txt | 2022-11-02 17:14:57 | |
 0001101302-22-000050-xbrl.zip | 349352 | 2022-11-02 17:14:57 |
| entg-20221001.htm | 2379940 | 2022-11-02 17:14:57 |
| entg-20221001.xsd | 36873 | 2022-11-02 17:14:57 |
| entg-20221001xex101.htm | 35495 | 2022-11-02 17:14:57 |
| entg-20221001xex102.htm | 72886 | 2022-11-02 17:14:57 |
| entg-20221001xex311.htm | 9239 | 2022-11-02 17:14:57 |
| entg-20221001xex312.htm | 9326 | 2022-11-02 17:14:57 |
| entg-20221001xex321.htm | 5437 | 2022-11-02 17:14:57 |
| entg-20221001_cal.xml | 78843 | 2022-11-02 17:14:57 |
| entg-20221001_def.xml | 256415 | 2022-11-02 17:14:57 |
 entg-20221001_g1.jpg | 42851 | 2022-11-02 17:14:57 |
| entg-20221001_htm.xml | 2028601 | 2022-11-02 17:14:57 |
| entg-20221001_lab.xml | 504486 | 2022-11-02 17:14:57 |
| entg-20221001_pre.xml | 366057 | 2022-11-02 17:14:57 |
| FilingSummary.xml | 35022 | 2022-11-02 17:14:57 |
| Financial_Report.xlsx | 101413 | 2022-11-02 17:14:57 |
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| R1.htm | 51556 | 2022-11-02 17:14:57 |
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| R11.htm | 83459 | 2022-11-02 17:14:57 |
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| report.css | 2767 | 2022-11-02 17:14:57 |
| Show.js | 1085 | 2022-11-02 17:14:57 |