Segment Reporting - Summary of Financial Information by Reportable Segment and Geography (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Oct. 01, 2022	Oct. 02, 2021	Oct. 01, 2022	Oct. 02, 2021
Segment Reporting Information [Line Items]
Net Sales	$ 993,828	$ 579,493	$ 2,335,963	$ 1,663,689
Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	224,192	154,605	569,380	460,707
Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	280,550	225,877	821,320	660,497
Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	210,405	186,200	632,602	507,243
Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	293,854	21,775	352,816	62,580
intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	(15,173)	(8,964)	(40,155)	(27,338)
North America
Segment Reporting Information [Line Items]
Net Sales	251,214	139,765	553,191	397,311
North America | Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	86,259	47,636	191,394	142,994
North America | Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	42,716	35,828	113,984	106,568
North America | Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	67,794	60,350	205,414	161,792
North America | Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	69,618	4,915	82,554	13,295
North America | intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	(15,173)	(8,964)	(40,155)	(27,338)
Taiwan
Segment Reporting Information [Line Items]
Net Sales	182,314	113,792	483,811	320,466
Taiwan | Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	29,462	24,479	85,040	69,196
Taiwan | Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	70,536	57,806	232,711	155,830
Taiwan | Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	38,712	26,615	111,722	79,286
Taiwan | Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	43,604	4,892	54,338	16,154
Taiwan | intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	0	0	0	0
China
Segment Reporting Information [Line Items]
Net Sales	166,960	84,295	369,170	260,211
China | Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	26,805	21,678	77,799	63,442
China | Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	58,398	35,003	142,639	118,595
China | Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	28,717	23,975	87,347	70,418
China | Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	53,040	3,639	61,385	7,756
China | intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	0	0	0	0
South Korea
Segment Reporting Information [Line Items]
Net Sales	119,854	76,905	292,260	231,387
South Korea | Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	19,931	18,319	56,793	58,266
South Korea | Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	30,583	24,763	93,718	83,725
South Korea | Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	29,339	28,487	89,367	73,769
South Korea | Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	40,001	5,336	52,382	15,627
South Korea | intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	0	0	0	0
Japan
Segment Reporting Information [Line Items]
Net Sales	91,008	77,780	258,665	221,307
Japan | Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	22,563	20,735	65,659	66,258
Japan | Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	42,505	42,440	137,103	114,654
Japan | Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	16,336	13,701	44,701	37,875
Japan | Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	9,604	904	11,202	2,520
Japan | intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	0	0	0	0
Europe
Segment Reporting Information [Line Items]
Net Sales	102,753	56,875	219,131	144,034
Europe | Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	21,892	11,952	46,499	32,025
Europe | Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	20,977	17,583	60,670	44,562
Europe | Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	18,401	26,041	65,976	63,171
Europe | Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	41,483	1,299	45,986	4,276
Europe | intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	0	0	0	0
Southeast Asia
Segment Reporting Information [Line Items]
Net Sales	79,725	30,081	159,735	88,973
Southeast Asia | Specialty Chemicals and Electronic Materials SCEM
Segment Reporting Information [Line Items]
Net Sales	17,280	9,806	46,196	28,526
Southeast Asia | Microcontamination Control MC
Segment Reporting Information [Line Items]
Net Sales	14,835	12,454	40,495	36,563
Southeast Asia | Advanced Materials Handling AMH
Segment Reporting Information [Line Items]
Net Sales	11,106	7,031	28,075	20,932
Southeast Asia | Advanced Planarization Solutions
Segment Reporting Information [Line Items]
Net Sales	36,504	790	44,969	2,952
Southeast Asia | intersegment elimination
Segment Reporting Information [Line Items]
Net Sales	$ 0	$ 0	$ 0	$ 0