Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001564590-22-007637-index-headers.html | 2022-02-28 16:28:05 | |
| 0001564590-22-007637-index.html | 2022-02-28 16:28:05 | |
| 0001564590-22-007637.txt | 2022-02-28 16:28:05 | |
 0001564590-22-007637-xbrl.zip | 859494 | 2022-02-28 16:28:05 |
| FilingSummary.xml | 82634 | 2022-02-28 16:28:05 |
| Financial_Report.xlsx | 190357 | 2022-02-28 16:28:05 |
 gmewoofkpnyl000001.jpg | 520377 | 2022-02-28 16:28:05 |
| MetaLinks.json | 1280359 | 2022-02-28 16:28:05 |
| mksi-10k_20211231.htm | 6229198 | 2022-02-28 16:28:05 |
| mksi-10k_20211231_htm.xml | 6778365 | 2022-02-28 16:28:05 |
| mksi-20211231.xsd | 125836 | 2022-02-28 16:28:05 |
| mksi-20211231_cal.xml | 123204 | 2022-02-28 16:28:05 |
| mksi-20211231_def.xml | 459613 | 2022-02-28 16:28:05 |
| mksi-20211231_lab.xml | 883949 | 2022-02-28 16:28:05 |
| mksi-20211231_pre.xml | 761243 | 2022-02-28 16:28:05 |
| mksi-ex211_9.htm | 29827 | 2022-02-28 16:28:05 |
| mksi-ex22_527.htm | 91972 | 2022-02-28 16:28:05 |
| mksi-ex231_12.htm | 2565 | 2022-02-28 16:28:05 |
| mksi-ex311_7.htm | 16633 | 2022-02-28 16:28:05 |
| mksi-ex312_11.htm | 16647 | 2022-02-28 16:28:05 |
| mksi-ex321_13.htm | 10350 | 2022-02-28 16:28:05 |
| R1.htm | 69095 | 2022-02-28 16:28:05 |
| R10.htm | 55591 | 2022-02-28 16:28:05 |
| R100.htm | 17476 | 2022-02-28 16:28:05 |
| R101.htm | 17281 | 2022-02-28 16:28:05 |
| R102.htm | 12013 | 2022-02-28 16:28:05 |
| R103.htm | 29689 | 2022-02-28 16:28:05 |
| R104.htm | 33618 | 2022-02-28 16:28:05 |
| R105.htm | 16644 | 2022-02-28 16:28:05 |
| R106.htm | 44778 | 2022-02-28 16:28:05 |
| R107.htm | 15657 | 2022-02-28 16:28:05 |
| R108.htm | 9639 | 2022-02-28 16:28:05 |
| R109.htm | 18366 | 2022-02-28 16:28:05 |
| R11.htm | 20211 | 2022-02-28 16:28:05 |
| R110.htm | 38002 | 2022-02-28 16:28:05 |
| R111.htm | 21933 | 2022-02-28 16:28:05 |
| R112.htm | 14781 | 2022-02-28 16:28:05 |
| R113.htm | 68968 | 2022-02-28 16:28:05 |
| R114.htm | 15475 | 2022-02-28 16:28:05 |
| R115.htm | 21301 | 2022-02-28 16:28:05 |
| R116.htm | 31374 | 2022-02-28 16:28:05 |
| R117.htm | 28106 | 2022-02-28 16:28:05 |
| R118.htm | 12242 | 2022-02-28 16:28:05 |
| R119.htm | 11686 | 2022-02-28 16:28:05 |
| R12.htm | 163613 | 2022-02-28 16:28:05 |
| R120.htm | 14137 | 2022-02-28 16:28:05 |
| R121.htm | 9746 | 2022-02-28 16:28:05 |
| R122.htm | 45607 | 2022-02-28 16:28:05 |
| R123.htm | 20506 | 2022-02-28 16:28:05 |
| R13.htm | 143453 | 2022-02-28 16:28:05 |
| R14.htm | 175114 | 2022-02-28 16:28:05 |
| R15.htm | 499402 | 2022-02-28 16:28:05 |
| R16.htm | 212864 | 2022-02-28 16:28:05 |
| R17.htm | 25752 | 2022-02-28 16:28:05 |
| R18.htm | 44855 | 2022-02-28 16:28:05 |
| R19.htm | 51661 | 2022-02-28 16:28:05 |
| R2.htm | 122305 | 2022-02-28 16:28:05 |
| R20.htm | 179732 | 2022-02-28 16:28:05 |
| R21.htm | 31061 | 2022-02-28 16:28:05 |
| R22.htm | 75114 | 2022-02-28 16:28:05 |
| R23.htm | 303688 | 2022-02-28 16:28:05 |
| R24.htm | 177883 | 2022-02-28 16:28:05 |
| R25.htm | 12508 | 2022-02-28 16:28:05 |
| R26.htm | 186889 | 2022-02-28 16:28:05 |
| R27.htm | 57078 | 2022-02-28 16:28:05 |
| R28.htm | 449383 | 2022-02-28 16:28:05 |
| R29.htm | 25773 | 2022-02-28 16:28:05 |
| R3.htm | 22022 | 2022-02-28 16:28:05 |
| R30.htm | 24181 | 2022-02-28 16:28:05 |
| R31.htm | 205554 | 2022-02-28 16:28:05 |
| R32.htm | 99301 | 2022-02-28 16:28:05 |
| R33.htm | 154957 | 2022-02-28 16:28:05 |
| R34.htm | 140998 | 2022-02-28 16:28:05 |
| R35.htm | 171837 | 2022-02-28 16:28:05 |
| R36.htm | 489343 | 2022-02-28 16:28:05 |
| R37.htm | 212093 | 2022-02-28 16:28:05 |
| R38.htm | 25652 | 2022-02-28 16:28:05 |
| R39.htm | 43344 | 2022-02-28 16:28:05 |
| R4.htm | 114437 | 2022-02-28 16:28:05 |
| R40.htm | 48729 | 2022-02-28 16:28:05 |
| R41.htm | 180238 | 2022-02-28 16:28:05 |
| R42.htm | 30400 | 2022-02-28 16:28:05 |
| R43.htm | 55286 | 2022-02-28 16:28:05 |
| R44.htm | 301819 | 2022-02-28 16:28:05 |
| R45.htm | 174574 | 2022-02-28 16:28:05 |
| R46.htm | 187310 | 2022-02-28 16:28:05 |
| R47.htm | 54636 | 2022-02-28 16:28:05 |
| R48.htm | 432538 | 2022-02-28 16:28:05 |
| R49.htm | 20552 | 2022-02-28 16:28:05 |
| R5.htm | 53652 | 2022-02-28 16:28:05 |
| R50.htm | 23829 | 2022-02-28 16:28:05 |
| R51.htm | 61606 | 2022-02-28 16:28:05 |
| R52.htm | 23467 | 2022-02-28 16:28:05 |
| R53.htm | 19050 | 2022-02-28 16:28:05 |
| R54.htm | 9961 | 2022-02-28 16:28:05 |
| R55.htm | 48608 | 2022-02-28 16:28:05 |
| R56.htm | 32223 | 2022-02-28 16:28:05 |
| R57.htm | 12606 | 2022-02-28 16:28:05 |
| R58.htm | 14323 | 2022-02-28 16:28:05 |
| R59.htm | 6714 | 2022-02-28 16:28:05 |
| R6.htm | 4618 | 2022-02-28 16:28:05 |
| R60.htm | 8911 | 2022-02-28 16:28:05 |
| R61.htm | 12810 | 2022-02-28 16:28:05 |
| R62.htm | 26197 | 2022-02-28 16:28:05 |
| R63.htm | 26116 | 2022-02-28 16:28:05 |
| R64.htm | 105479 | 2022-02-28 16:28:05 |
| R65.htm | 27103 | 2022-02-28 16:28:05 |
| R66.htm | 20686 | 2022-02-28 16:28:05 |
| R67.htm | 24297 | 2022-02-28 16:28:05 |
| R68.htm | 16927 | 2022-02-28 16:28:05 |
| R69.htm | 9618 | 2022-02-28 16:28:05 |
| R7.htm | 101113 | 2022-02-28 16:28:05 |
| R70.htm | 6913 | 2022-02-28 16:28:05 |
| R71.htm | 12095 | 2022-02-28 16:28:05 |
| R72.htm | 4588 | 2022-02-28 16:28:05 |
| R73.htm | 23739 | 2022-02-28 16:28:05 |
| R74.htm | 4949 | 2022-02-28 16:28:05 |
| R75.htm | 9973 | 2022-02-28 16:28:05 |
| R76.htm | 26707 | 2022-02-28 16:28:05 |
| R77.htm | 20487 | 2022-02-28 16:28:05 |
| R78.htm | 21705 | 2022-02-28 16:28:05 |
| R79.htm | 23749 | 2022-02-28 16:28:05 |
| R8.htm | 6998 | 2022-02-28 16:28:05 |
| R80.htm | 12175 | 2022-02-28 16:28:05 |
| R81.htm | 9524 | 2022-02-28 16:28:05 |
| R82.htm | 15252 | 2022-02-28 16:28:05 |
| R83.htm | 13466 | 2022-02-28 16:28:05 |
| R84.htm | 11262 | 2022-02-28 16:28:05 |
| R85.htm | 10431 | 2022-02-28 16:28:05 |
| R86.htm | 8460 | 2022-02-28 16:28:05 |
| R87.htm | 6399 | 2022-02-28 16:28:05 |
| R88.htm | 4774 | 2022-02-28 16:28:05 |
| R89.htm | 38011 | 2022-02-28 16:28:05 |
| R9.htm | 7358 | 2022-02-28 16:28:05 |
| R90.htm | 69132 | 2022-02-28 16:28:05 |
| R91.htm | 12222 | 2022-02-28 16:28:05 |
| R92.htm | 16278 | 2022-02-28 16:28:05 |
| R93.htm | 37974 | 2022-02-28 16:28:05 |
| R94.htm | 38330 | 2022-02-28 16:28:05 |
| R95.htm | 39774 | 2022-02-28 16:28:05 |
| R96.htm | 28598 | 2022-02-28 16:28:05 |
| R97.htm | 11309 | 2022-02-28 16:28:05 |
| R98.htm | 60193 | 2022-02-28 16:28:05 |
| R99.htm | 21539 | 2022-02-28 16:28:05 |
| report.css | 2768 | 2022-02-28 16:28:05 |
| Show.js | 1086 | 2022-02-28 16:28:05 |