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Cover Page - USD ($)
 12 Months Ended
Dec. 31, 2021
Feb. 11, 2022
Jun. 30, 2021
Cover [Abstract]      
Amendment Flag false    
Document Type 10-K    
Document Annual Report true    
Document Fiscal Year Focus 2021    
Document Fiscal Period Focus FY    
Document Transition Report false    
Current Fiscal Year End Date --12-31    
Entity Well-known Seasoned Issuer Yes    
Entity Voluntary Filers No    
Document Period End Date Dec. 31, 2021    
Entity Interactive Data Current Yes    
Entity Current Reporting Status Yes    
Entity Registrant Name MKS INSTRUMENTS, INC.    
Entity Central Index Key 0001049502    
Trading Symbol MKSI    
Entity Filer Category Large Accelerated Filer    
Entity Shell Company false    
Entity Emerging Growth Company false    
Entity Small Business false    
Entity Common Stock, Shares Outstanding   55,517,182  
Entity Public Float     $ 9,867,033,883
Entity File Number 0-23621    
Entity Tax Identification Number 04-2277512    
Entity Address, Address Line One 2 Tech Drive, Suite 201,    
Entity Address, City or Town Andover    
Entity Address, State or Province MA    
Entity Address, Postal Zip Code 01810    
Entity Incorporation, State or Country Code MA    
City Area Code 978    
Local Phone Number 645-5500    
Security Exchange Name NASDAQ    
Title of 12(b) Security Common Stock    
ICFR Auditor Attestation Flag true    
Auditor Firm ID 238    
Auditor Name PricewaterhouseCoopers LLP    
Auditor Location Boston, Massachusetts    
Documents Incorporated by Reference

Portions of the definitive Proxy Statement for our 2022 Annual Meeting of Shareholders, to be filed with the Securities and Exchange Commission no later than 120 days after the close of our fiscal year ended December 31, 2021, are incorporated by reference into Part III of this Annual Report on Form 10-K.