Business combination, price per share of common stock in cash.

No definition available.

Name:	mksi_BusinessCombinationPricePerShareOfCommonStockInCash
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Business combination share received per common stock.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	instant

- Definition

Commitments and contingencies.

+ References

No definition available.

+ Details

Name:	mksi_CommitmentsAndContingenciesLineItems
Namespace Prefix:	mksi_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Majority of MKS purchase commitment arrangement time period/term.

+ References

No definition available.

+ Details

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Namespace Prefix:	mksi_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Date when the business acquisition agreement was executed, in YYYY-MM-DD format.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:dateItemType
Balance Type:	na
Period Type:	duration

- Definition

Percentage points added to the reference rate to compute the variable rate on the debt instrument.

+ References

No definition available.

+ Details

Name:	us-gaap_DebtInstrumentBasisSpreadOnVariableRate1
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	duration

- Definition

Face (par) amount of debt instrument at time of issuance.

+ References

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+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.

+ References

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+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.

+ References

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Minimum amount to be expended to satisfy the terms of arrangements in which the entity has agreed to expend funds to procure goods or services, excluding long-term purchase commitments or unconditional purchase obligations.

+ References

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Minimum amount of purchase arrangement in which the entity has agreed to expend funds to procure goods or services from a supplier.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Details

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Namespace Prefix:
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Balance Type:
Period Type:

- Details

Name:	us-gaap_VestingAxis=mksi_USDollarTrancheMember
Namespace Prefix:
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Balance Type:
Period Type:

- Details

Name:	us-gaap_DerivativeInstrumentRiskAxis=us-gaap_InterestRateFloorMember
Namespace Prefix:
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Balance Type:
Period Type:

- Details

Name:	us-gaap_DerivativeInstrumentRiskAxis=mksi_OriginalIssueDiscountMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_VestingAxis=mksi_EuroTrancheMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_BusinessAcquisitionAxis=mksi_AtotechLimitedMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_CreditFacilityAxis=us-gaap_RevolvingCreditFacilityMember
Namespace Prefix:
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Commitments and Contingencies - Additional Information (Detail) € in Millions			12 Months Ended
	Oct. 22, 2021 USD ($)	Jul. 01, 2021 USD ($) shares	Dec. 31, 2021 USD ($)	Oct. 23, 2021 USD ($)	Oct. 22, 2021 EUR (€)
Commitments And Contingencies [Line Items]
Purchase commitments covered by aggregate value			$ 367,700,000
Purchase commitments			less than one year
Liabilities. purchase obligation			$ 0
New Term Loan Facility [Member]
Commitments And Contingencies [Line Items]
Borrowing capacity in the form of letters of credit				$ 4,700,000,000
New Term Loan Facility [Member] \| U.S. Dollar Tranche [Member]
Commitments And Contingencies [Line Items]
Borrowing capacity in the form of letters of credit	$ 4,700,000,000
Debt instrument, interest rate	2.25%
New Term Loan Facility [Member] \| U.S. Dollar Tranche [Member] \| Floor Rate [Member]
Commitments And Contingencies [Line Items]
Debt instrument, interest rate	0.50%
New Term Loan Facility [Member] \| U.S. Dollar Tranche [Member] \| Original Issue Discount
Commitments And Contingencies [Line Items]
Debt instrument, interest rate	0.25%
New Term Loan Facility [Member] \| Euro Tranche
Commitments And Contingencies [Line Items]
Borrowing capacity in the form of letters of credit	$ 600,000,000				€ 500
Debt instrument, interest rate	2.75%
New Term Loan Facility [Member] \| Euro Tranche \| Floor Rate [Member]
Commitments And Contingencies [Line Items]
Debt instrument, interest rate	0.00%
New Term Loan Facility [Member] \| Euro Tranche \| Original Issue Discount
Commitments And Contingencies [Line Items]
Debt instrument, interest rate	0.25%
Atotech [Member]
Commitments And Contingencies [Line Items]
Date of acquisition agreement		Jul. 01, 2021
Price per share of common stock in cash		$ 16,200,000
Number of shares received per common shares \| shares		0.0552
Business acquisition, total value of aggregate cash and stock consideration		$ 5,100,000,000
Atotech [Member] \| New Term Loan Facility [Member]
Commitments And Contingencies [Line Items]
Senior secured credit facility		5,300,000,000
Atotech [Member] \| Revolving Lines of Credit [Member]
Commitments And Contingencies [Line Items]
Senior secured credit facility		$ 500,000,000