Business Segment, Geographic Area, Product Information and Significant Customer Information - Additional Information (Detail)	12 Months Ended
Dec. 31, 2021 Customer Segment	Dec. 31, 2020 Customer	Dec. 31, 2019 Customer
Segment Reporting Information [Line Items]
Number of reportable segments \| Segment	3
Number of customers accounted for 47% ,44% and 33% of net revenue	10	10	10
Number of customers accounted for greater than 90 % of net revenue	10	10	10
Number of customers accounted for 10% or more of total revenue	2		0
Sales Revenue, Net [Member] \| Customer Concentration Risk [Member] \| Top Ten Customers [Member]
Segment Reporting Information [Line Items]
Concentration risk, percentage	47.00%	44.00%	33.00%
Sales Revenue, Net [Member] \| Customer Concentration Risk [Member] \| Semiconductor Products [Member]
Segment Reporting Information [Line Items]
Concentration risk, percentage	62.00%	59.00%	49.00%
Sales Revenue, Net [Member] \| Customer Concentration Risk [Member] \| Semiconductor Products [Member] \| Minimum [Member]
Segment Reporting Information [Line Items]
Concentration risk, percentage	90.00%	90.00%	90.00%

Number of customers accounted for forty seven percent forty four percent and thirty three percent of revenue.

No definition available.

Name:	mksi_NumberOfCustomersAccountedForFortySevenPercentFortyFourPercentAndThirtyThreePercentOfRevenue
Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

- Definition

Number of customers accounted for ninety percent of revenue

+ References

No definition available.

+ Details

Name:	mksi_NumberOfCustomersAccountedForNinetyPercentOfRevenue
Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

- Definition

Number of customers accounted for ten or more percent of revenue.

+ References

No definition available.

+ Details

Name:	mksi_NumberOfCustomersAccountedForTenOrMorePercentOfRevenue
Namespace Prefix:	mksi_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

- Definition

For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 280
-SubTopic 10
-Section 50
-Paragraph 42
-URI http://asc.fasb.org/extlink&oid=123359005&loc=d3e9054-108599

Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 275
-SubTopic 10
-Section 50
-Paragraph 18
-URI http://asc.fasb.org/extlink&oid=99393423&loc=d3e6351-108592

Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 825
-SubTopic 10
-Section 50
-Paragraph 20
-URI http://asc.fasb.org/extlink&oid=123594938&loc=d3e13531-108611

Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 825
-SubTopic 10
-Section 50
-Paragraph 21
-Subparagraph (a)
-URI http://asc.fasb.org/extlink&oid=123594938&loc=d3e13537-108611

Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 275
-SubTopic 10
-Section 50
-Paragraph 20
-URI http://asc.fasb.org/extlink&oid=99393423&loc=d3e6404-108592

+ Details

Name:	us-gaap_ConcentrationRiskPercentage1
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	duration

- Definition

Number of segments reported by the entity. A reportable segment is a component of an entity for which there is an accounting requirement to report separate financial information on that component in the entity's financial statements.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 280
-SubTopic 10
-Section 50
-Paragraph 18
-URI http://asc.fasb.org/extlink&oid=123359005&loc=d3e8672-108599

+ Details

Name:	us-gaap_NumberOfReportableSegments
Namespace Prefix:	us-gaap_
Data Type:	xbrli:integerItemType
Balance Type:	na
Period Type:	duration

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_SegmentReportingInformationLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Details

Name:	us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_MajorCustomersAxis=mksi_TopTenCustomersMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_MajorCustomersAxis=mksi_SemiconductorProductsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_RangeAxis=srt_MinimumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: