Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001558370-22-016292-index-headers.html | 2022-11-03 17:12:28 | |
| 0001558370-22-016292-index.html | 2022-11-03 17:12:28 | |
| 0001558370-22-016292.txt | 2022-11-03 17:12:28 | |
 0001558370-22-016292-xbrl.zip | 211874 | 2022-11-03 17:12:28 |
| acls-20220930.xsd | 40748 | 2022-11-03 17:12:28 |
| acls-20220930x10q.htm | 2077498 | 2022-11-03 17:12:28 |
| acls-20220930x10q_htm.xml | 1413085 | 2022-11-03 17:12:28 |
| acls-20220930xex10d1.htm | 57108 | 2022-11-03 17:12:28 |
| acls-20220930xex31d1.htm | 12615 | 2022-11-03 17:12:28 |
| acls-20220930xex31d2.htm | 13056 | 2022-11-03 17:12:28 |
| acls-20220930xex32d1.htm | 6841 | 2022-11-03 17:12:28 |
| acls-20220930xex32d2.htm | 6067 | 2022-11-03 17:12:28 |
| acls-20220930_cal.xml | 69344 | 2022-11-03 17:12:28 |
| acls-20220930_def.xml | 147499 | 2022-11-03 17:12:28 |
| acls-20220930_lab.xml | 387516 | 2022-11-03 17:12:28 |
| acls-20220930_pre.xml | 273954 | 2022-11-03 17:12:28 |
| FilingSummary.xml | 33790 | 2022-11-03 17:12:28 |
| Financial_Report.xlsx | 74100 | 2022-11-03 17:12:28 |
| MetaLinks.json | 532464 | 2022-11-03 17:12:28 |
| R1.htm | 51573 | 2022-11-03 17:12:28 |
| R10.htm | 7699 | 2022-11-03 17:12:28 |
| R11.htm | 198513 | 2022-11-03 17:12:28 |
| R12.htm | 89240 | 2022-11-03 17:12:28 |
| R13.htm | 35561 | 2022-11-03 17:12:28 |
| R14.htm | 43875 | 2022-11-03 17:12:28 |
| R15.htm | 24440 | 2022-11-03 17:12:28 |
| R16.htm | 17158 | 2022-11-03 17:12:28 |
| R17.htm | 20913 | 2022-11-03 17:12:28 |
| R18.htm | 31362 | 2022-11-03 17:12:28 |
| R19.htm | 60116 | 2022-11-03 17:12:28 |
| R2.htm | 88942 | 2022-11-03 17:12:28 |
| R20.htm | 11324 | 2022-11-03 17:12:28 |
| R21.htm | 9828 | 2022-11-03 17:12:28 |
| R22.htm | 5946 | 2022-11-03 17:12:28 |
| R23.htm | 10235 | 2022-11-03 17:12:28 |
| R24.htm | 7231 | 2022-11-03 17:12:28 |
| R25.htm | 6039 | 2022-11-03 17:12:28 |
| R26.htm | 199371 | 2022-11-03 17:12:28 |
| R27.htm | 87185 | 2022-11-03 17:12:28 |
| R28.htm | 31291 | 2022-11-03 17:12:28 |
| R29.htm | 41311 | 2022-11-03 17:12:28 |
| R3.htm | 24900 | 2022-11-03 17:12:28 |
| R30.htm | 23133 | 2022-11-03 17:12:28 |
| R31.htm | 16018 | 2022-11-03 17:12:28 |
| R32.htm | 20586 | 2022-11-03 17:12:28 |
| R33.htm | 30261 | 2022-11-03 17:12:28 |
| R34.htm | 53391 | 2022-11-03 17:12:28 |
| R35.htm | 18255 | 2022-11-03 17:12:28 |
| R36.htm | 9655 | 2022-11-03 17:12:28 |
| R37.htm | 36352 | 2022-11-03 17:12:28 |
| R38.htm | 24436 | 2022-11-03 17:12:28 |
| R39.htm | 75692 | 2022-11-03 17:12:28 |
| R4.htm | 114347 | 2022-11-03 17:12:28 |
| R40.htm | 11346 | 2022-11-03 17:12:28 |
| R41.htm | 12803 | 2022-11-03 17:12:28 |
| R42.htm | 19224 | 2022-11-03 17:12:28 |
| R43.htm | 5431 | 2022-11-03 17:12:28 |
| R44.htm | 9656 | 2022-11-03 17:12:28 |
| R45.htm | 35190 | 2022-11-03 17:12:28 |
| R46.htm | 19710 | 2022-11-03 17:12:28 |
| R47.htm | 18920 | 2022-11-03 17:12:28 |
| R48.htm | 12009 | 2022-11-03 17:12:28 |
| R49.htm | 22571 | 2022-11-03 17:12:28 |
| R5.htm | 10641 | 2022-11-03 17:12:28 |
| R50.htm | 19715 | 2022-11-03 17:12:28 |
| R51.htm | 26562 | 2022-11-03 17:12:28 |
| R52.htm | 19685 | 2022-11-03 17:12:28 |
| R53.htm | 21131 | 2022-11-03 17:12:28 |
| R54.htm | 8518 | 2022-11-03 17:12:28 |
| R6.htm | 92384 | 2022-11-03 17:12:28 |
| R7.htm | 74078 | 2022-11-03 17:12:28 |
| R8.htm | 7382 | 2022-11-03 17:12:28 |
| R9.htm | 6331 | 2022-11-03 17:12:28 |
| report.css | 2767 | 2022-11-03 17:12:28 |
| Show.js | 1085 | 2022-11-03 17:12:28 |