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Inventories, net (Details) - USD ($)
$ in Thousands
Sep. 30, 2022
Dec. 31, 2021
Inventories, net    
Raw materials $ 165,568 $ 133,784
Work in process 43,641 43,164
Finished goods (completed systems) 17,298 18,036
Inventories, net $ 226,507 $ 194,984