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Inventories, net (Tables)
9 Months Ended
Sep. 30, 2022
Inventories, net  
Schedule of components of inventories

September 30,

December 31,

    

2022

    

2021

    

(in thousands)

Raw materials

$

165,568

$

133,784

Work in process

 

43,641

 

43,164

Finished goods (completed systems)

 

17,298

 

18,036

Inventories, net

$

226,507

$

194,984