Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-24-000074-index-headers.html | 2024-11-04 17:22:06 | |
| 0001101302-24-000074-index.html | 2024-11-04 17:22:06 | |
| 0001101302-24-000074.txt | 2024-11-04 17:22:06 | |
 0001101302-24-000074-xbrl.zip | 247979 | 2024-11-04 17:22:06 |
| entg-20240928.htm | 1700368 | 2024-11-04 17:22:06 |
| entg-20240928.xsd | 36430 | 2024-11-04 17:22:06 |
| entg-20240928xex311.htm | 8993 | 2024-11-04 17:22:06 |
| entg-20240928xex312.htm | 8996 | 2024-11-04 17:22:06 |
| entg-20240928xex321.htm | 5342 | 2024-11-04 17:22:06 |
| entg-20240928_cal.xml | 73751 | 2024-11-04 17:22:06 |
| entg-20240928_def.xml | 218148 | 2024-11-04 17:22:06 |
 entg-20240928_g1.jpg | 42851 | 2024-11-04 17:22:06 |
| entg-20240928_htm.xml | 1188071 | 2024-11-04 17:22:06 |
| entg-20240928_lab.xml | 538875 | 2024-11-04 17:22:06 |
| entg-20240928_pre.xml | 381944 | 2024-11-04 17:22:06 |
| FilingSummary.xml | 34808 | 2024-11-04 17:22:06 |
| Financial_Report.xlsx | 89878 | 2024-11-04 17:22:06 |
| MetaLinks.json | 787895 | 2024-11-04 17:22:06 |
| R1.htm | 51550 | 2024-11-04 17:22:06 |
| R10.htm | 10822 | 2024-11-04 17:22:06 |
| R11.htm | 15579 | 2024-11-04 17:22:06 |
| R12.htm | 9399 | 2024-11-04 17:22:06 |
| R13.htm | 25901 | 2024-11-04 17:22:06 |
| R14.htm | 11901 | 2024-11-04 17:22:06 |
| R15.htm | 54409 | 2024-11-04 17:22:06 |
| R16.htm | 38909 | 2024-11-04 17:22:06 |
| R17.htm | 42488 | 2024-11-04 17:22:06 |
| R18.htm | 38411 | 2024-11-04 17:22:06 |
| R19.htm | 9997 | 2024-11-04 17:22:06 |
| R2.htm | 125715 | 2024-11-04 17:22:06 |
| R20.htm | 19499 | 2024-11-04 17:22:06 |
| R21.htm | 21835 | 2024-11-04 17:22:06 |
| R22.htm | 167441 | 2024-11-04 17:22:06 |
| R23.htm | 6986 | 2024-11-04 17:22:06 |
| R24.htm | 15347 | 2024-11-04 17:22:06 |
| R25.htm | 6080 | 2024-11-04 17:22:06 |
| R26.htm | 20501 | 2024-11-04 17:22:06 |
| R27.htm | 13005 | 2024-11-04 17:22:06 |
| R28.htm | 26550 | 2024-11-04 17:22:06 |
| R29.htm | 12862 | 2024-11-04 17:22:06 |
| R3.htm | 33726 | 2024-11-04 17:22:06 |
| R30.htm | 61334 | 2024-11-04 17:22:06 |
| R31.htm | 29217 | 2024-11-04 17:22:06 |
| R32.htm | 37767 | 2024-11-04 17:22:06 |
| R33.htm | 41307 | 2024-11-04 17:22:06 |
| R34.htm | 20908 | 2024-11-04 17:22:06 |
| R35.htm | 20378 | 2024-11-04 17:22:06 |
| R36.htm | 162686 | 2024-11-04 17:22:06 |
| R37.htm | 11355 | 2024-11-04 17:22:06 |
| R38.htm | 12821 | 2024-11-04 17:22:06 |
| R39.htm | 9493 | 2024-11-04 17:22:06 |
| R4.htm | 91752 | 2024-11-04 17:22:06 |
| R40.htm | 55427 | 2024-11-04 17:22:06 |
| R41.htm | 13849 | 2024-11-04 17:22:06 |
| R42.htm | 19432 | 2024-11-04 17:22:06 |
| R43.htm | 26173 | 2024-11-04 17:22:06 |
| R44.htm | 20277 | 2024-11-04 17:22:06 |
| R45.htm | 47549 | 2024-11-04 17:22:06 |
| R46.htm | 18335 | 2024-11-04 17:22:06 |
| R47.htm | 28685 | 2024-11-04 17:22:06 |
| R48.htm | 39783 | 2024-11-04 17:22:06 |
| R49.htm | 32007 | 2024-11-04 17:22:06 |
| R5.htm | 30941 | 2024-11-04 17:22:06 |
| R50.htm | 4663 | 2024-11-04 17:22:06 |
| R51.htm | 11583 | 2024-11-04 17:22:06 |
| R52.htm | 9948 | 2024-11-04 17:22:06 |
| R53.htm | 5118 | 2024-11-04 17:22:06 |
| R54.htm | 17341 | 2024-11-04 17:22:06 |
| R55.htm | 33208 | 2024-11-04 17:22:06 |
| R56.htm | 25543 | 2024-11-04 17:22:06 |
| R57.htm | 69584 | 2024-11-04 17:22:06 |
| R58.htm | 9689 | 2024-11-04 17:22:06 |
| R6.htm | 7464 | 2024-11-04 17:22:06 |
| R7.htm | 116604 | 2024-11-04 17:22:06 |
| R8.htm | 4969 | 2024-11-04 17:22:06 |
| R9.htm | 118284 | 2024-11-04 17:22:06 |
| report.css | 2767 | 2024-11-04 17:22:06 |
| Show.js | 1085 | 2024-11-04 17:22:06 |