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| 0001564590-20-049959.txt | 2020-11-03 14:17:54 | |
 0001564590-20-049959-xbrl.zip | 278417 | 2020-11-03 14:17:54 |
| FilingSummary.xml | 65654 | 2020-11-03 14:17:54 |
| Financial_Report.xlsx | 140965 | 2020-11-03 14:17:54 |
| MetaLinks.json | 944968 | 2020-11-03 14:17:54 |
| mksi-10q_20200930.htm | 4751424 | 2020-11-03 14:17:54 |
| mksi-10q_20200930_htm.xml | 5303407 | 2020-11-03 14:17:54 |
| mksi-20200930.xsd | 90501 | 2020-11-03 14:17:54 |
| mksi-20200930_cal.xml | 91607 | 2020-11-03 14:17:54 |
| mksi-20200930_def.xml | 368611 | 2020-11-03 14:17:54 |
| mksi-20200930_lab.xml | 644625 | 2020-11-03 14:17:54 |
| mksi-20200930_pre.xml | 578620 | 2020-11-03 14:17:54 |
| mksi-ex311_116.htm | 17656 | 2020-11-03 14:17:54 |
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