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Stock-Based Compensation - Additional Information (Detail)
$ in Millions
9 Months Ended
Sep. 30, 2020
USD ($)
shares
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Common stock reserved for issuance 18,000,000
Total compensation expense related to unvested stock-based awards granted to employees, officers and directors | $ $ 37.7
Restricted Stock Units (RSUs) [Member]  
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Shares issued as per merger agreement 749,000
Restricted Stock Units (RSUs) [Member] | ESI Plan member [Member] | Outside Directors [Member]  
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Newport RSUs converted to MKS RSUs at Merger date 326,000
Newport Corporation | Restricted Stock Units (RSUs) [Member] | ESI Plan member [Member]  
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Shares issued as per merger agreement 736,000
Newport Corporation | Stock Appreciation Rights (SARs) [Member] | ESI Plan member [Member]  
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Shares issued as per merger agreement 13,000