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| 0000950170-22-014195-index.html | 2022-08-03 15:24:23 | |
| 0000950170-22-014195.txt | 2022-08-03 15:24:23 | |
 0000950170-22-014195-xbrl.zip | 312261 | 2022-08-03 15:24:23 |
| FilingSummary.xml | 61845 | 2022-08-03 15:24:23 |
| Financial_Report.xlsx | 130252 | 2022-08-03 15:24:23 |
| MetaLinks.json | 967930 | 2022-08-03 15:24:23 |
| mksi-20220630.htm | 4311119 | 2022-08-03 15:24:23 |
| mksi-20220630.xsd | 87134 | 2022-08-03 15:24:23 |
| mksi-20220630_cal.xml | 79645 | 2022-08-03 15:24:23 |
| mksi-20220630_def.xml | 342352 | 2022-08-03 15:24:23 |
| mksi-20220630_htm.xml | 4768090 | 2022-08-03 15:24:23 |
| mksi-20220630_lab.xml | 637694 | 2022-08-03 15:24:23 |
| mksi-20220630_pre.xml | 537816 | 2022-08-03 15:24:23 |
| mksi-ex31_1.htm | 20400 | 2022-08-03 15:24:23 |
| mksi-ex31_2.htm | 20276 | 2022-08-03 15:24:23 |
| mksi-ex32_1.htm | 17359 | 2022-08-03 15:24:23 |
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| report.css | 2768 | 2022-08-03 15:24:23 |
| Show.js | 1086 | 2022-08-03 15:24:23 |