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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-22-014195
Filing Date
2022-08-03
Accepted
2022-08-03 15:24:23
Documents
109
Period of Report
2022-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q mksi-20220630.htm   iXBRL 10-Q 4311119
2 EX-31.1 mksi-ex31_1.htm EX-31.1 20400
3 EX-31.2 mksi-ex31_2.htm EX-31.2 20276
4 EX-32.1 mksi-ex32_1.htm EX-32.1 17359
  Complete submission text file 0000950170-22-014195.txt   18145298

Data Files

Seq Description Document Type Size
5 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT mksi-20220630_pre.xml EX-101.PRE 537816
6 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT mksi-20220630_cal.xml EX-101.CAL 79645
7 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT mksi-20220630_lab.xml EX-101.LAB 637694
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT mksi-20220630.xsd EX-101.SCH 87134
9 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT mksi-20220630_def.xml EX-101.DEF 342352
103 EXTRACTED XBRL INSTANCE DOCUMENT mksi-20220630_htm.xml XML 4768090
Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

IRS No.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 221132285
SIC: 3823 Industrial Instruments For Measurement, Display, and Control