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| 0000950170-22-006906-index.html | 2022-05-02 17:17:13 | |
| 0000950170-22-006906.txt | 2022-05-02 17:17:13 | |
 0000950170-22-006906-xbrl.zip | 286556 | 2022-05-02 17:17:13 |
| FilingSummary.xml | 60642 | 2022-05-02 17:17:13 |
| Financial_Report.xlsx | 116618 | 2022-05-02 17:17:13 |
| MetaLinks.json | 951797 | 2022-05-02 17:17:13 |
| mksi-20220331.htm | 3497955 | 2022-05-02 17:17:13 |
| mksi-20220331.xsd | 86558 | 2022-05-02 17:17:13 |
| mksi-20220331_cal.xml | 77812 | 2022-05-02 17:17:13 |
| mksi-20220331_def.xml | 342883 | 2022-05-02 17:17:13 |
| mksi-20220331_htm.xml | 4080585 | 2022-05-02 17:17:13 |
| mksi-20220331_lab.xml | 635276 | 2022-05-02 17:17:13 |
| mksi-20220331_pre.xml | 539614 | 2022-05-02 17:17:13 |
| mksi-ex31_1.htm | 20221 | 2022-05-02 17:17:13 |
| mksi-ex31_2.htm | 20091 | 2022-05-02 17:17:13 |
| mksi-ex32_1.htm | 17150 | 2022-05-02 17:17:13 |
| R1.htm | 52311 | 2022-05-02 17:17:13 |
| R10.htm | 149761 | 2022-05-02 17:17:13 |
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| report.css | 2768 | 2022-05-02 17:17:13 |
| Show.js | 1086 | 2022-05-02 17:17:13 |