Leases - Additional Information (Detail) - USD ($) $ in Millions	3 Months Ended
Mar. 31, 2022	Mar. 31, 2021
Leases [Line Items]
Weighted average discount rate	3.00%	2.90%
Weighted average remaining lease term	13 years 10 months 24 days	14 years 9 months 18 days
Operating cash flows used for operating leases	$ 5	$ 4
Tenant improvement allowance receipts	$ 1	$ 4

Leases.

No definition available.

Name:	mksi_LeasesLineItems
Namespace Prefix:	mksi_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Tenant improvements allowance receipts.

+ References

No definition available.

+ Details

Name:	mksi_TenantImprovementsAllowanceReceipts
Namespace Prefix:	mksi_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 45
-Paragraph 5
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=123391704&loc=SL77918643-209977

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(1)
-URI http://asc.fasb.org/extlink&oid=123408670&loc=SL77918686-209980

+ Details

Name:	us-gaap_OperatingLeasePayments
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Weighted average discount rate for operating lease calculated at point in time.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(4)
-URI http://asc.fasb.org/extlink&oid=123408670&loc=SL77918686-209980

Reference 2: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI http://asc.fasb.org/extlink&oid=123414884&loc=SL77918982-209971

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI http://asc.fasb.org/extlink&oid=123414884&loc=SL77918982-209971

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-URI http://asc.fasb.org/extlink&oid=123408670&loc=SL77918686-209980

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant