Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-13-059171-index-headers.html | 2013-08-02 08:28:00 | |
| 0001104659-13-059171-index.html | 2013-08-02 08:28:00 | |
| 0001104659-13-059171.txt | 2013-08-02 08:28:00 | |
 0001104659-13-059171-xbrl.zip | 155949 | 2013-08-02 08:28:00 |
| a13-12901_110q.htm | 915458 | 2013-08-02 08:28:00 |
| a13-12901_1ex10d1.htm | 114697 | 2013-08-02 08:28:00 |
| a13-12901_1ex10d2.htm | 120557 | 2013-08-02 08:28:00 |
| a13-12901_1ex31d1.htm | 12976 | 2013-08-02 08:28:00 |
| a13-12901_1ex31d2.htm | 12850 | 2013-08-02 08:28:00 |
| a13-12901_1ex32d1.htm | 5202 | 2013-08-02 08:28:00 |
| a13-12901_1ex32d2.htm | 5221 | 2013-08-02 08:28:00 |
| acls-20130630.xml | 432245 | 2013-08-02 08:28:00 |
| acls-20130630.xsd | 76908 | 2013-08-02 08:28:00 |
| acls-20130630_cal.xml | 50947 | 2013-08-02 08:28:00 |
| acls-20130630_def.xml | 280216 | 2013-08-02 08:28:00 |
| acls-20130630_lab.xml | 1212992 | 2013-08-02 08:28:00 |
| acls-20130630_pre.xml | 570509 | 2013-08-02 08:28:00 |
| FilingSummary.xml | 21136 | 2013-08-02 08:28:00 |
| Financial_Report.xls | 417777 | 2013-08-02 08:28:00 |
| R1.htm | 29285 | 2013-08-02 08:28:00 |
| R1.xml | 29081 | 2013-08-02 08:28:00 |
| R10.htm | 47408 | 2013-08-02 08:28:00 |
| R10.xml | 51930 | 2013-08-02 08:28:00 |
| R11.htm | 27641 | 2013-08-02 08:28:00 |
| R11.xml | 29433 | 2013-08-02 08:28:00 |
| R12.htm | 22320 | 2013-08-02 08:28:00 |
| R12.xml | 24005 | 2013-08-02 08:28:00 |
| R13.htm | 14238 | 2013-08-02 08:28:00 |
| R13.xml | 15260 | 2013-08-02 08:28:00 |
| R14.htm | 28656 | 2013-08-02 08:28:00 |
| R14.xml | 31318 | 2013-08-02 08:28:00 |
| R15.htm | 49756 | 2013-08-02 08:28:00 |
| R15.xml | 54031 | 2013-08-02 08:28:00 |
| R16.htm | 8728 | 2013-08-02 08:28:00 |
| R16.xml | 8820 | 2013-08-02 08:28:00 |
| R17.htm | 9477 | 2013-08-02 08:28:00 |
| R17.xml | 9221 | 2013-08-02 08:28:00 |
| R18.htm | 9579 | 2013-08-02 08:28:00 |
| R18.xml | 9352 | 2013-08-02 08:28:00 |
| R19.htm | 9994 | 2013-08-02 08:28:00 |
| R19.xml | 10001 | 2013-08-02 08:28:00 |
| R2.htm | 86274 | 2013-08-02 08:28:00 |
| R2.xml | 113333 | 2013-08-02 08:28:00 |
| R20.htm | 10732 | 2013-08-02 08:28:00 |
| R20.xml | 10287 | 2013-08-02 08:28:00 |
| R21.htm | 11776 | 2013-08-02 08:28:00 |
| R21.xml | 12774 | 2013-08-02 08:28:00 |
| R22.htm | 47498 | 2013-08-02 08:28:00 |
| R22.xml | 51424 | 2013-08-02 08:28:00 |
| R23.htm | 23939 | 2013-08-02 08:28:00 |
| R23.xml | 26060 | 2013-08-02 08:28:00 |
| R24.htm | 17640 | 2013-08-02 08:28:00 |
| R24.xml | 19144 | 2013-08-02 08:28:00 |
| R25.htm | 13880 | 2013-08-02 08:28:00 |
| R25.xml | 14483 | 2013-08-02 08:28:00 |
| R26.htm | 27029 | 2013-08-02 08:28:00 |
| R26.xml | 29534 | 2013-08-02 08:28:00 |
| R27.htm | 37766 | 2013-08-02 08:28:00 |
| R27.xml | 41656 | 2013-08-02 08:28:00 |
| R28.htm | 5545 | 2013-08-02 08:28:00 |
| R28.xml | 9644 | 2013-08-02 08:28:00 |
| R29.htm | 12248 | 2013-08-02 08:28:00 |
| R29.xml | 27467 | 2013-08-02 08:28:00 |
| R3.htm | 24962 | 2013-08-02 08:28:00 |
| R3.xml | 32739 | 2013-08-02 08:28:00 |
| R30.htm | 10670 | 2013-08-02 08:28:00 |
| R30.xml | 22534 | 2013-08-02 08:28:00 |
| R31.htm | 21932 | 2013-08-02 08:28:00 |
| R31.xml | 34947 | 2013-08-02 08:28:00 |
| R32.htm | 28115 | 2013-08-02 08:28:00 |
| R32.xml | 72367 | 2013-08-02 08:28:00 |
| R33.htm | 34138 | 2013-08-02 08:28:00 |
| R33.xml | 57227 | 2013-08-02 08:28:00 |
| R34.htm | 28397 | 2013-08-02 08:28:00 |
| R34.xml | 37715 | 2013-08-02 08:28:00 |
| R35.htm | 31026 | 2013-08-02 08:28:00 |
| R35.xml | 43532 | 2013-08-02 08:28:00 |
| R36.htm | 9990 | 2013-08-02 08:28:00 |
| R36.xml | 29791 | 2013-08-02 08:28:00 |
| R37.htm | 8951 | 2013-08-02 08:28:00 |
| R37.xml | 15707 | 2013-08-02 08:28:00 |
| R38.htm | 14007 | 2013-08-02 08:28:00 |
| R38.xml | 12664 | 2013-08-02 08:28:00 |
| R39.htm | 15129 | 2013-08-02 08:28:00 |
| R39.xml | 81489 | 2013-08-02 08:28:00 |
| R4.htm | 121707 | 2013-08-02 08:28:00 |
| R4.xml | 110013 | 2013-08-02 08:28:00 |
| R40.htm | 45804 | 2013-08-02 08:28:00 |
| R40.xml | 93179 | 2013-08-02 08:28:00 |
| R5.htm | 32419 | 2013-08-02 08:28:00 |
| R5.xml | 33431 | 2013-08-02 08:28:00 |
| R6.htm | 101573 | 2013-08-02 08:28:00 |
| R6.xml | 100859 | 2013-08-02 08:28:00 |
| R7.htm | 14472 | 2013-08-02 08:28:00 |
| R7.xml | 13948 | 2013-08-02 08:28:00 |
| R8.htm | 10352 | 2013-08-02 08:28:00 |
| R8.xml | 10088 | 2013-08-02 08:28:00 |
| R9.htm | 6099 | 2013-08-02 08:28:00 |
| R9.xml | 6178 | 2013-08-02 08:28:00 |
| report.css | 2740 | 2013-08-02 08:28:00 |
| Show.js | 1410 | 2013-08-02 08:28:00 |