Inventories, net (Tables)

6 Months Ended

Jun. 30, 2013

Inventories, net

Schedule of components of inventories

	June 30,		December 31,
	2013		2012
	(in thousands)
Raw materials	$	60,760	$	72,013
Work in process	16,514		12,253
Finished goods (completed systems)	19,138		15,968
	$	96,412	$	100,234