Inventories, net (Details) (USD $)	3 Months Ended	6 Months Ended		3 Months Ended		6 Months Ended
	Jun. 30, 2013	Jun. 30, 2013	Dec. 31, 2012	Jun. 30, 2013 Dry strip product line, intellectual property rights and certain assets	Mar. 31, 2013 Dry strip product line, intellectual property rights and certain assets mm	Jun. 30, 2013 Dry strip product line, intellectual property rights and certain assets
Inventories, net
Raw materials	$ 60,760,000	$ 60,760,000	$ 72,013,000
Work in process	16,514,000	16,514,000	12,253,000
Finished goods (completed systems)	19,138,000	19,138,000	15,968,000
Inventories, net	96,412,000	96,412,000	100,234,000
Inventory reserves	34,900,000	34,900,000	33,600,000
Inventories, net
Cost of sales due to non-recoverable inventory components				0		2,100,000
Size of dry strip wafer equipment and products, Company license to make and sell (in millimeters)					300
Cost of sales due to below normal production capacity	$ 0	$ 500,000