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| 0001101302-22-000042.txt | 2022-08-02 11:57:19 | |
 0001101302-22-000042-xbrl.zip | 270463 | 2022-08-02 11:57:19 |
| entg-20220702.htm | 1851784 | 2022-08-02 11:57:19 |
| entg-20220702.xsd | 31340 | 2022-08-02 11:57:19 |
| entg-20220702_cal.xml | 75983 | 2022-08-02 11:57:19 |
| entg-20220702_def.xml | 202098 | 2022-08-02 11:57:19 |
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| entg-20220702_htm.xml | 1435867 | 2022-08-02 11:57:19 |
| entg-20220702_lab.xml | 408773 | 2022-08-02 11:57:19 |
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| entg-202272xex312.htm | 9322 | 2022-08-02 11:57:19 |
| entg-202272xex321.htm | 5430 | 2022-08-02 11:57:19 |
| FilingSummary.xml | 29673 | 2022-08-02 11:57:19 |
| Financial_Report.xlsx | 76043 | 2022-08-02 11:57:19 |
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| R1.htm | 52146 | 2022-08-02 11:57:19 |
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| report.css | 2767 | 2022-08-02 11:57:19 |
| Show.js | 1085 | 2022-08-02 11:57:19 |