Date when the business acquisition agreement was executed, in YYYY-MM-DD format.

No definition available.

Name:	us-gaap_BusinessAcquisitionDateOfAcquisitionAgreement1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:dateItemType
Balance Type:	na
Period Type:	duration

- Definition

Number of shares of equity interests issued or issuable to acquire entity.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (b)(4)
-URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479

+ Details

Name:	us-gaap_BusinessAcquisitionEquityInterestsIssuedOrIssuableNumberOfSharesIssued
Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Price of a single share of a number of saleable stocks paid or offered to be paid in a business combination.

+ References

No definition available.

+ Details

Name:	us-gaap_BusinessAcquisitionSharePrice
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:perShareItemType
Balance Type:	na
Period Type:	instant

- Definition

The cash inflow associated with the acquisition of business during the period (for example, cash that was held by the acquired business).

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 12
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3179-108585

+ Details

Name:	us-gaap_CashAcquiredFromAcquisition
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Cash outflow during the period as a deposit on account for application (deposits to retire or pay down) against an amount of debt owed by the entity.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 15
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3291-108585

+ Details

Name:	us-gaap_PaymentsForDepositsAppliedToDebtRetirements
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash outflow associated with the acquisition of business during the period. The cash portion only of the acquisition price.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 805
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (b)(1)
-URI https://asc.fasb.org/extlink&oid=126975305&loc=d3e6927-128479

Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 13
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585

+ Details

Name:	us-gaap_PaymentsToAcquireBusinessesGross
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The cash outflow associated with the acquisition of a business, net of the cash acquired from the purchase.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 13
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3213-108585

+ Details

Name:	us-gaap_PaymentsToAcquireBusinessesNetOfCashAcquired
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Number of shares of stock issued during the period pursuant to acquisitions.

+ References

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02(29))
-URI https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682

Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 505
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.3-04)
-URI https://asc.fasb.org/extlink&oid=120397183&loc=d3e187085-122770

Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02(28))
-URI https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682

+ Details

Name:	us-gaap_StockIssuedDuringPeriodSharesAcquisitions
Namespace Prefix:	us-gaap_
Data Type:	xbrli:sharesItemType
Balance Type:	na
Period Type:	duration

- Details

Name:	us-gaap_BusinessAcquisitionAxis=entg_CMCMaterialsMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

CMC Acquisition (Details) - USD ($) $ / shares in Units, $ in Thousands		6 Months Ended
	Jul. 06, 2022	Jul. 02, 2022	Jul. 03, 2021
Business Acquisition [Line Items]
Acquisition of businesses, net of cash acquired		$ 0	$ 2,250
CMC Materials \| Subsequent Event [Member]
Business Acquisition [Line Items]
Date of acquisition	Jul. 06, 2022
Business Acquisition, Share Price	$ 133.00
Stock Issued During Period, Shares, Acquisitions	0.4506
Payments to acquire business	$ 5,700,000
Acquisition of businesses, net of cash acquired	$ 3,800,000
Business Acquisition, Equity Interest Issued or Issuable, Number of Shares	12,900,000
Payments for Deposits Applied to Debt Retirements	$ 900,000
Cash Acquired from Acquisition	$ 200,000