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|---|---|---|
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| 0001101302-18-000053-index.html | 2018-10-25 16:04:44 | |
| 0001101302-18-000053.txt | 2018-10-25 16:04:44 | |
 0001101302-18-000053-xbrl.zip | 157736 | 2018-10-25 16:04:44 |
| entg-20180929.xml | 1370333 | 2018-10-25 16:04:44 |
| entg-20180929.xsd | 30039 | 2018-10-25 16:04:44 |
| entg-20180929_cal.xml | 80486 | 2018-10-25 16:04:44 |
| entg-20180929_def.xml | 229014 | 2018-10-25 16:04:44 |
| entg-20180929_lab.xml | 416294 | 2018-10-25 16:04:44 |
| entg-20180929_pre.xml | 275857 | 2018-10-25 16:04:44 |
| entg-2018929x10q.htm | 1118561 | 2018-10-25 16:04:44 |
| entg-2018929xex311.htm | 10582 | 2018-10-25 16:04:44 |
| entg-2018929xex312.htm | 10825 | 2018-10-25 16:04:44 |
| entg-2018929xex321.htm | 7406 | 2018-10-25 16:04:44 |
| FilingSummary.xml | 25945 | 2018-10-25 16:04:44 |
| Financial_Report.xlsx | 57102 | 2018-10-25 16:04:44 |
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| R9.htm | 69589 | 2018-10-25 16:04:44 |
| report.css | 2767 | 2018-10-25 16:04:44 |
| Show.js | 1085 | 2018-10-25 16:04:44 |