Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-21-060958-index-headers.html | 2021-05-04 16:05:43 | |
| 0001104659-21-060958-index.html | 2021-05-04 16:05:43 | |
| 0001104659-21-060958.txt | 2021-05-04 16:05:43 | |
 0001104659-21-060958-xbrl.zip | 16424 | 2021-05-04 16:05:43 |
| acls-20210504.xsd | 3184 | 2021-05-04 16:05:43 |
| acls-20210504_lab.xml | 34592 | 2021-05-04 16:05:43 |
| acls-20210504_pre.xml | 22709 | 2021-05-04 16:05:43 |
| FilingSummary.xml | 1639 | 2021-05-04 16:05:43 |
| Financial_Report.xlsx | 5668 | 2021-05-04 16:05:43 |
| MetaLinks.json | 38582 | 2021-05-04 16:05:43 |
| R1.htm | 38614 | 2021-05-04 16:05:43 |
| report.css | 2767 | 2021-05-04 16:05:43 |
| Show.js | 1085 | 2021-05-04 16:05:43 |
| tm2114974d1_8k.htm | 25645 | 2021-05-04 16:05:43 |
| tm2114974d1_8k_htm.xml | 3501 | 2021-05-04 16:05:43 |
| tm2114974d1_ex99-1.htm | 74982 | 2021-05-04 16:05:43 |
 tm2114974d1_ex99-1img001.jpg | 2049 | 2021-05-04 16:05:43 |