0001113232 false 0001113232 2021-05-04 2021-05-04 iso4217:USD xbrli:shares iso4217:USD xbrli:shares





Washington, D.C. 20549





Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934


Date of Report (Date of earliest event reported): May 4, 2021


Axcelis Technologies, Inc.

(Exact name of registrant as specified in its charter)


Delaware   000-30941   34-1818596
(State or other jurisdiction   (Commission   (IRS Employer
of incorporation)   File Number)   Identification No.)


108 Cherry Hill Drive, Beverly, Massachusetts   01915
(Address of principal executive offices)   (Zip Code)


Registrant’s telephone number, including area code: (978) 787-4000


(Former name or former address, if changed since last report.)


Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions (see General Instruction A.2.):


¨Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)
¨Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)
¨Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))
¨Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))


Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933(§230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (§240.12b-2 of this chapter).


Emerging growth company ¨


If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. ¨


Securities registered pursuant to Section 12(b) of the Act:


Title of each class Trading symbol(s) Name of each exchange on which registered
Common Stock, par value $0.001 per share ACLS NASDAQ Global Select Market






Item 2.02 Results of Operations and Financial Condition 


On May 4, 2021, Axcelis Technologies, Inc. (the “Company”) issued a press release regarding its financial results for its quarter ended March 31, 2021. The Company’s press release is attached as Exhibit 99.1 to this Current Report on Form 8-K and incorporated by reference herein.


Item 9.01   Financial Statements and Exhibits.


Exhibit No.   Description
99.1   Press Release dated May 4, 2021. Filed herewith.
104   Cover Page Interactive Data File (embedded within the Inline XBRL document)







Pursuant to the requirements of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.


Date: May 4, 2021 Axcelis Technologies, Inc.
    Kevin J. Brewer
    Executive Vice President
    and Chief Financial Officer







EX-99.1 2 tm2114974d1_ex99-1.htm EXHIBIT 99.1


Exhibit 99.1


News Release



The Company Expects to Exceed $550M Revenues in 2021


BEVERLY, Mass. — May 4, 2021—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2021.


Highlights for the first quarter are as follows:


·The Company reported first quarter revenue of $132.8 million, compared to $122.2 million for the fourth quarter of 2020.
·Operating profit for the quarter was $20.3 million, compared to $14.1 million for the fourth quarter.
·Net income for the quarter was $16.5 million, or $0.48 per diluted share, compared to net income of $14.7 million, or $0.43 per diluted share for the fourth quarter.
·Gross margin for the quarter was 42.5%, compared to 43.4% in the fourth quarter.
·Cash, cash equivalents and restricted cash were $207.5 million on March 31, 2021, compared to $204.2 million on December 31, 2020.
·Shipped the first Purion H200™ SiC tool, enabling Axcelis to provide power device customers with a full suite of Purion products to support all of their ion implant needs.
·Closed the evaluation of a Purion VXE™ and shipped a Purion XEmax™ evaluation to a second customer for use in advanced image sensor development.


President and CEO Mary Puma commented, “Axcelis delivered strong first quarter financial performance, driven by the growing demand for our Purion™ products and strength across a number of markets. Given market trends and the traction of our Purion base products and product line extensions, Axcelis is on track to exceed $550 million in revenue for the full year 2021, achieving this goal a full year ahead of schedule.”


Business Outlook


For the second quarter ending June 30, 2021, Axcelis expects revenues ranging from $135 to $140 million. Gross margin in the second quarter is expected to be approximately 41.5%. Second quarter operating profit is forecasted to be in the range of $19-21 million with earnings per diluted share in the range of $0.43-0.47.


First Quarter 2021 Conference Call


The Company will host a call to discuss the results for the first quarter on Wednesday, May 5, 2021 at 8:30 am ET. The call will be available to interested listeners via an audio webcast that can be accessed through the Investors page of Axcelis' website at www.axcelis.com, or by dialing 866.588.8911 (707.294.1561 outside North America). Participants calling into the conference call will be requested to provide the company name, Axcelis Technologies, and Audience Passcode: 7664896. Webcast replays will be available for 30 days following the call.






News Release

Safe Harbor Statement


This press release and the conference call contain forward-looking statements under the Private Securities Litigation Reform Act safe harbor provisions. These statements, which include our expectations for spending in our industry and guidance for future financial performance, are based on management’s current expectations and should be viewed with caution. They are subject to various risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements, many of which are outside the control of the Company, including that customer decisions to place orders or our product shipments may not occur when we expect, that orders may not be converted to revenue in any particular quarter, or at all, whether demand will continue for the semiconductor equipment we produce or, if not, whether we can successfully meet changing market requirements, and whether we will be able to maintain continuity of business relationships with and purchases by major customers. Increased competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and instability caused by changing global economic, political or financial conditions could also cause actual results to differ materially from those in our forward-looking statements. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.


About Axcelis:


Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.


Company Contacts


Investor Relations:

Doug Lawson



Maureen Hart






News Release


Axcelis Technologies, Inc.

Consolidated Statements of Operations

(In thousands, except per share amounts)



   Three months ended 
   March 31, 
   2021   2020 
Product  $126,609   $112,133 
Services   6,167    6,858 
Total revenue   132,776    118,991 
Cost of revenue:          
Product   70,334    67,172 
Services   6,007    6,270 
Total cost of revenue   76,341    73,442 
Gross profit   56,435    45,549 
Operating expenses:          
Research and development   15,685    14,606 
Sales and marketing   10,387    8,204 
General and administrative   10,013    9,036 
Total operating expenses   36,085    31,846 
Income from operations   20,350    13,703 
Other (expense) income:          
Interest income   33    482 
Interest expense   (1,029)   (1,303)
Other, net   (1,153)   (620)
Total other expense   (2,149)   (1,441)
Income before income taxes   18,201    12,262 
Income tax provision   1,721    1,041 
Net income  $16,480   $11,221 
Net income per share:          
Basic  $0.49   $0.34 
Diluted  $0.48   $0.33 
Shares used in computing net income per share:          
Basic weighted average common shares   33,715    32,872 
Diluted weighted average common shares   34,643    34,057 





News Release 


Axcelis Technologies, Inc.

Consolidated Balance Sheets

(In thousands, except per share amounts)



   March 31,   December 31, 
   2021   2020 
Current assets:          
Cash and cash equivalents  $206,766   $203,479 
Accounts receivable, net   75,932    86,865 
Inventories, net   174,381    161,076 
Prepaid expenses and other current assets   22,513    19,371 
Total current assets   479,592    470,791 
Property, plant and equipment, net   30,459    29,840 
Operating lease assets   4,213    4,542 
Finance lease assets, net   20,216    20,544 
Long-term restricted cash   753    753 
Deferred income taxes   54,936    57,851 
Other assets   39,123    40,303 
Total assets  $629,292   $624,624 
Current liabilities:          
Accounts payable  $40,476   $24,013 
Accrued compensation   8,573    24,562 
Warranty   4,181    4,280 
Income taxes   648    654 
Deferred revenue   20,417    21,221 
Current portion of finance lease obligation   809    756 
Other current liabilities   8,774    8,945 
Total current liabilities   83,878    84,431 
Long-term finance lease obligation   47,167    47,393 
Long-term deferred revenue   1,725    1,837 
Other long-term liabilities   8,862    9,361 
Total liabilities   141,632    143,022 
Stockholders’ equity:          
Common stock, $0.001 par value, 75,000 shares authorized; 33,679 shares issued and outstanding at March 31, 2021; 33,633 shares issued and outstanding at December 31, 2020   34    34 
Additional paid-in capital   567,199    570,102 
Accumulated deficit   (81,656)   (91,969)
Accumulated other comprehensive income   2,083    3,435 
Total stockholders’ equity   487,660    481,602 
Total liabilities and stockholders’ equity  $629,292   $624,624 




EX-101.SCH 3 acls-20210504.xsd XBRL TAXONOMY EXTENSION SCHEMA 00000001 - Document - Cover link:presentationLink link:calculationLink link:definitionLink EX-101.LAB 4 acls-20210504_lab.xml XBRL TAXONOMY EXTENSION LABEL LINKBASE Cover [Abstract] Document Type Amendment Flag Amendment Description Document Registration Statement Document Annual Report Document Quarterly Report Document Transition Report Document Shell Company Report Document Shell Company Event Date Document Period Start Date Document Period End Date Document Fiscal Period Focus Document Fiscal Year Focus Current Fiscal Year End Date Entity File Number Entity Registrant Name Entity Central Index Key Entity Primary SIC Number Entity Tax Identification Number Entity Incorporation, State or Country Code Entity Address, Address Line One Entity Address, Address Line Two Entity Address, Address Line Three Entity Address, City or Town Entity Address, State or Province Entity Address, Country Entity Address, Postal Zip Code Country Region City Area Code Local Phone Number Extension Written Communications Soliciting Material Pre-commencement Tender Offer Pre-commencement Issuer Tender Offer Title of 12(b) Security No Trading Symbol Flag Trading Symbol Security Exchange Name Title of 12(g) Security Security Reporting Obligation Annual Information Form Audited Annual Financial Statements Entity Well-known Seasoned Issuer Entity Voluntary Filers Entity Current Reporting Status Entity Interactive Data Current Entity Filer Category Entity Small Business Entity Emerging Growth Company Elected Not To Use the Extended Transition Period Document Accounting Standard Other Reporting Standard Item Number Entity Shell Company Entity Public Float Entity Bankruptcy Proceedings, Reporting Current Entity Common Stock, Shares Outstanding Documents Incorporated by Reference [Text Block] EX-101.PRE 5 acls-20210504_pre.xml XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE GRAPHIC 6 tm2114974d1_ex99-1img001.jpg GRAPHIC begin 644 tm2114974d1_ex99-1img001.jpg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tm2114974d1_8k_htm.xml IDEA: XBRL DOCUMENT 0001113232 2021-05-04 2021-05-04 iso4217:USD shares iso4217:USD shares 0001113232 false 8-K 2021-05-04 Axcelis Technologies, Inc. DE 000-30941 34-1818596 108 Cherry Hill Drive Beverly MA 01915 978 787-4000 false false false false false Common Stock, par value $0.001 per share ACLS NASDAQ XML 8 R1.htm IDEA: XBRL DOCUMENT v3.21.1
May 04, 2021
Cover [Abstract]  
Document Type 8-K
Amendment Flag false
Document Period End Date May 04, 2021
Entity File Number 000-30941
Entity Registrant Name Axcelis Technologies, Inc.
Entity Central Index Key 0001113232
Entity Tax Identification Number 34-1818596
Entity Incorporation, State or Country Code DE
Entity Address, Address Line One 108 Cherry Hill Drive
Entity Address, City or Town Beverly
Entity Address, State or Province MA
Entity Address, Postal Zip Code 01915
City Area Code 978
Local Phone Number 787-4000
Written Communications false
Soliciting Material false
Pre-commencement Tender Offer false
Pre-commencement Issuer Tender Offer false
Title of 12(b) Security Common Stock, par value $0.001 per share
Trading Symbol ACLS
Security Exchange Name NASDAQ
Entity Emerging Growth Company false
EXCEL 9 Financial_Report.xlsx IDEA: XBRL DOCUMENT begin 644 Financial_Report.xlsx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end XML 10 Show.js IDEA: XBRL DOCUMENT // Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission. Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105. var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0); e.removeAttribute('id');a.parentNode.appendChild(e)}} if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'} e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}} XML 11 report.css IDEA: XBRL DOCUMENT /* Updated 2009-11-04 */ /* v2.2.0.24 */ /* DefRef Styles */ ..report table.authRefData{ background-color: #def; border: 2px solid #2F4497; font-size: 1em; position: absolute; } ..report table.authRefData a { display: block; font-weight: bold; } ..report table.authRefData p { margin-top: 0px; } ..report table.authRefData .hide { background-color: #2F4497; padding: 1px 3px 0px 0px; text-align: right; } ..report table.authRefData .hide a:hover { background-color: #2F4497; } ..report table.authRefData .body { height: 150px; overflow: auto; width: 400px; } ..report table.authRefData table{ font-size: 1em; } /* Report Styles */ ..pl a, .pl a:visited { color: black; text-decoration: none; } /* table */ ..report { background-color: white; border: 2px solid #acf; clear: both; color: black; font: normal 8pt Helvetica, Arial, san-serif; margin-bottom: 2em; } ..report hr { border: 1px solid #acf; } /* Top labels */ ..report th { background-color: #acf; color: black; font-weight: bold; text-align: center; } ..report th.void { background-color: transparent; color: #000000; font: bold 10pt Helvetica, Arial, san-serif; text-align: left; } ..report .pl { text-align: left; vertical-align: top; white-space: normal; width: 200px; white-space: normal; /* word-wrap: break-word; */ } ..report td.pl a.a { cursor: pointer; display: block; width: 200px; overflow: hidden; } ..report td.pl div.a { width: 200px; } ..report td.pl a:hover { background-color: #ffc; } /* Header rows... */ ..report tr.rh { background-color: #acf; color: black; font-weight: bold; } /* Calendars... */ ..report .rc { background-color: #f0f0f0; } /* Even rows... */ ..report .re, .report .reu { background-color: #def; } ..report .reu td { border-bottom: 1px solid black; } /* Odd rows... */ ..report .ro, .report .rou { background-color: white; } ..report .rou td { border-bottom: 1px solid black; } ..report .rou table td, .report .reu table td { border-bottom: 0px solid black; } /* styles for footnote marker */ ..report .fn { white-space: nowrap; } /* styles for numeric types */ ..report .num, .report .nump { text-align: right; white-space: nowrap; } ..report .nump { padding-left: 2em; } ..report .nump { padding: 0px 0.4em 0px 2em; } /* styles for text types */ ..report .text { text-align: left; white-space: normal; } ..report .text .big { margin-bottom: 1em; width: 17em; } ..report .text .more { display: none; } ..report .text .note { font-style: italic; font-weight: bold; } ..report .text .small { width: 10em; } ..report sup { font-style: italic; } ..report .outerFootnotes { font-size: 1em; } XML 12 FilingSummary.xml IDEA: XBRL DOCUMENT 3.21.1 html 1 96 1 false 0 0 false 3 false false R1.htm 00000001 - Document - Cover Sheet http://axcelis.com/role/Cover Cover Cover 1 false false All Reports Book All Reports tm2114974d1_8k.htm acls-20210504.xsd acls-20210504_lab.xml acls-20210504_pre.xml tm2114974d1_ex99-1.htm http://xbrl.sec.gov/dei/2020-01-31 true false JSON 14 MetaLinks.json IDEA: XBRL DOCUMENT { "instance": { "tm2114974d1_8k.htm": { "axisCustom": 0, "axisStandard": 0, "contextCount": 1, "dts": { "definitionLink": { "remote": [ "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-eedm-def-2020-01-31.xml", "http://xbrl.fasb.org/srt/2020/elts/srt-eedm1-def-2020-01-31.xml" ] }, "inline": { "local": [ "tm2114974d1_8k.htm" ] }, "labelLink": { "local": [ "acls-20210504_lab.xml" ], "remote": [ "https://xbrl.sec.gov/dei/2020/dei-doc-2020-01-31.xml" ] }, "presentationLink": { "local": [ "acls-20210504_pre.xml" ] }, "referenceLink": { "remote": [ "https://xbrl.sec.gov/dei/2020/dei-ref-2020-01-31.xml" ] }, "schema": { "local": [ "acls-20210504.xsd" ], "remote": [ "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd", "http://www.xbrl.org/2003/xl-2003-12-31.xsd", "http://www.xbrl.org/2003/xlink-2003-12-31.xsd", "https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd", "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd", "http://www.xbrl.org/2005/xbrldt-2005.xsd", "http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd", "http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd", "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd", "http://www.xbrl.org/lrr/role/net-2009-12-16.xsd", "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd", "http://xbrl.fasb.org/us-gaap/2020/elts/us-roles-2020-01-31.xsd", "http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd", "http://www.xbrl.org/2006/ref-2006-02-27.xsd", "http://xbrl.fasb.org/srt/2020/elts/srt-types-2020-01-31.xsd", "http://xbrl.fasb.org/srt/2020/elts/srt-roles-2020-01-31.xsd", "https://xbrl.sec.gov/country/2020/country-2020-01-31.xsd", "http://xbrl.fasb.org/us-gaap/2020/elts/us-types-2020-01-31.xsd", "http://www.xbrl.org/lrr/role/deprecated-2009-12-16.xsd" ] } }, "elementCount": 59, "entityCount": 1, "hidden": { "http://xbrl.sec.gov/dei/2020-01-31": 2, "total": 2 }, "keyCustom": 0, "keyStandard": 96, "memberCustom": 0, "memberStandard": 0, "nsprefix": "acls", "nsuri": "http://axcelis.com/20210504", "report": { "R1": { "firstAnchor": { "ancestors": [ "span", "b", "p", "body", "html" ], "baseRef": "tm2114974d1_8k.htm", "contextRef": "From2021-05-04to2021-05-04", "decimals": null, "first": true, "lang": "en-US", "name": "dei:DocumentType", "reportCount": 1, "unique": true, "unitRef": null, "xsiNil": "false" }, "groupType": "document", "isDefault": "true", "longName": "00000001 - Document - Cover", "role": "http://axcelis.com/role/Cover", "shortName": "Cover", "subGroupType": "", "uniqueAnchor": { "ancestors": [ "span", "b", "p", "body", "html" ], "baseRef": "tm2114974d1_8k.htm", "contextRef": "From2021-05-04to2021-05-04", "decimals": null, "first": true, "lang": "en-US", "name": "dei:DocumentType", "reportCount": 1, "unique": true, "unitRef": null, "xsiNil": "false" } } }, "segmentCount": 0, "tag": { "dei_AmendmentDescription": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Description of changes contained within amended document.", "label": "Amendment Description" } } }, "localname": "AmendmentDescription", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "stringItemType" }, "dei_AmendmentFlag": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.", "label": "Amendment Flag" } } }, "localname": "AmendmentFlag", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_AnnualInformationForm": { "auth_ref": [ "r12" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag with value true on a form if it is an annual report containing an annual information form.", "label": "Annual Information Form" } } }, "localname": "AnnualInformationForm", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_AuditedAnnualFinancialStatements": { "auth_ref": [ "r12" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag with value true on a form if it is an annual report containing audited financial statements.", "label": "Audited Annual Financial Statements" } } }, "localname": "AuditedAnnualFinancialStatements", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_CityAreaCode": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Area code of city", "label": "City Area Code" } } }, "localname": "CityAreaCode", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_CountryRegion": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Region code of country", "label": "Country Region" } } }, "localname": "CountryRegion", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_CoverAbstract": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Cover page.", "label": "Cover [Abstract]" } } }, "localname": "CoverAbstract", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "xbrltype": "stringItemType" }, "dei_CurrentFiscalYearEndDate": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "End date of current fiscal year in the format --MM-DD.", "label": "Current Fiscal Year End Date" } } }, "localname": "CurrentFiscalYearEndDate", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "gMonthDayItemType" }, "dei_DocumentAccountingStandard": { "auth_ref": [ "r11" ], "lang": { "en-us": { "role": { "documentation": "The basis of accounting the registrant has used to prepare the financial statements included in this filing This can either be 'U.S. GAAP', 'International Financial Reporting Standards', or 'Other'.", "label": "Document Accounting Standard" } } }, "localname": "DocumentAccountingStandard", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "accountingStandardItemType" }, "dei_DocumentAnnualReport": { "auth_ref": [ "r9", "r11", "r12" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true only for a form used as an annual report.", "label": "Document Annual Report" } } }, "localname": "DocumentAnnualReport", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_DocumentFiscalPeriodFocus": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Fiscal period values are FY, Q1, Q2, and Q3. 1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.", "label": "Document Fiscal Period Focus" } } }, "localname": "DocumentFiscalPeriodFocus", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "fiscalPeriodItemType" }, "dei_DocumentFiscalYearFocus": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.", "label": "Document Fiscal Year Focus" } } }, "localname": "DocumentFiscalYearFocus", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "gYearItemType" }, "dei_DocumentPeriodEndDate": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented. If there is no historical data in the report, use the filing date. The format of the date is YYYY-MM-DD.", "label": "Document Period End Date" } } }, "localname": "DocumentPeriodEndDate", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "dateItemType" }, "dei_DocumentPeriodStartDate": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "The start date of the period covered in the document, in YYYY-MM-DD format.", "label": "Document Period Start Date" } } }, "localname": "DocumentPeriodStartDate", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "dateItemType" }, "dei_DocumentQuarterlyReport": { "auth_ref": [ "r10" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true only for a form used as an quarterly report.", "label": "Document Quarterly Report" } } }, "localname": "DocumentQuarterlyReport", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_DocumentRegistrationStatement": { "auth_ref": [ "r18" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true only for a form used as a registration statement.", "label": "Document Registration Statement" } } }, "localname": "DocumentRegistrationStatement", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_DocumentShellCompanyEventDate": { "auth_ref": [ "r11" ], "lang": { "en-us": { "role": { "documentation": "Date of event requiring a shell company report.", "label": "Document Shell Company Event Date" } } }, "localname": "DocumentShellCompanyEventDate", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "dateItemType" }, "dei_DocumentShellCompanyReport": { "auth_ref": [ "r11" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true for a Shell Company Report pursuant to section 13 or 15(d) of the Exchange Act.", "label": "Document Shell Company Report" } } }, "localname": "DocumentShellCompanyReport", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_DocumentTransitionReport": { "auth_ref": [ "r13" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true only for a form used as a transition report.", "label": "Document Transition Report" } } }, "localname": "DocumentTransitionReport", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_DocumentType": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.", "label": "Document Type" } } }, "localname": "DocumentType", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "submissionTypeItemType" }, "dei_DocumentsIncorporatedByReferenceTextBlock": { "auth_ref": [ "r1" ], "lang": { "en-us": { "role": { "documentation": "Documents incorporated by reference.", "label": "Documents Incorporated by Reference [Text Block]" } } }, "localname": "DocumentsIncorporatedByReferenceTextBlock", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "textBlockItemType" }, "dei_EntityAddressAddressLine1": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Address Line 1 such as Attn, Building Name, Street Name", "label": "Entity Address, Address Line One" } } }, "localname": "EntityAddressAddressLine1", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressAddressLine2": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Address Line 2 such as Street or Suite number", "label": "Entity Address, Address Line Two" } } }, "localname": "EntityAddressAddressLine2", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressAddressLine3": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Address Line 3 such as an Office Park", "label": "Entity Address, Address Line Three" } } }, "localname": "EntityAddressAddressLine3", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressCityOrTown": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Name of the City or Town", "label": "Entity Address, City or Town" } } }, "localname": "EntityAddressCityOrTown", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressCountry": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "ISO 3166-1 alpha-2 country code.", "label": "Entity Address, Country" } } }, "localname": "EntityAddressCountry", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "countryCodeItemType" }, "dei_EntityAddressPostalZipCode": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Code for the postal or zip code", "label": "Entity Address, Postal Zip Code" } } }, "localname": "EntityAddressPostalZipCode", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressStateOrProvince": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Name of the state or province.", "label": "Entity Address, State or Province" } } }, "localname": "EntityAddressStateOrProvince", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "stateOrProvinceItemType" }, "dei_EntityBankruptcyProceedingsReportingCurrent": { "auth_ref": [ "r4" ], "lang": { "en-us": { "role": { "documentation": "For registrants involved in bankruptcy proceedings during the preceding five years, the value Yes indicates that the registrant has filed all documents and reports required to be filed by Section 12, 13 or 15(d) of the Securities Exchange Act of 1934 subsequent to the distribution of securities under a plan confirmed by a court; the value No indicates the registrant has not. Registrants not involved in bankruptcy proceedings during the preceding five years should not report this element.", "label": "Entity Bankruptcy Proceedings, Reporting Current" } } }, "localname": "EntityBankruptcyProceedingsReportingCurrent", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_EntityCentralIndexKey": { "auth_ref": [ "r14" ], "lang": { "en-us": { "role": { "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.", "label": "Entity Central Index Key" } } }, "localname": "EntityCentralIndexKey", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "centralIndexKeyItemType" }, "dei_EntityCommonStockSharesOutstanding": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.", "label": "Entity Common Stock, Shares Outstanding" } } }, "localname": "EntityCommonStockSharesOutstanding", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "sharesItemType" }, "dei_EntityCurrentReportingStatus": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.", "label": "Entity Current Reporting Status" } } }, "localname": "EntityCurrentReportingStatus", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "yesNoItemType" }, "dei_EntityEmergingGrowthCompany": { "auth_ref": [ "r14" ], "lang": { "en-us": { "role": { "documentation": "Indicate if registrant meets the emerging growth company criteria.", "label": "Entity Emerging Growth Company" } } }, "localname": "EntityEmergingGrowthCompany", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_EntityExTransitionPeriod": { "auth_ref": [ "r17" ], "lang": { "en-us": { "role": { "documentation": "Indicate if an emerging growth company has elected not to use the extended transition period for complying with any new or revised financial accounting standards.", "label": "Elected Not To Use the Extended Transition Period" } } }, "localname": "EntityExTransitionPeriod", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_EntityFileNumber": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.", "label": "Entity File Number" } } }, "localname": "EntityFileNumber", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "fileNumberItemType" }, "dei_EntityFilerCategory": { "auth_ref": [ "r14" ], "lang": { "en-us": { "role": { "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.", "label": "Entity Filer Category" } } }, "localname": "EntityFilerCategory", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "filerCategoryItemType" }, "dei_EntityIncorporationStateCountryCode": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Two-character EDGAR code representing the state or country of incorporation.", "label": "Entity Incorporation, State or Country Code" } } }, "localname": "EntityIncorporationStateCountryCode", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "edgarStateCountryItemType" }, "dei_EntityInteractiveDataCurrent": { "auth_ref": [ "r15" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).", "label": "Entity Interactive Data Current" } } }, "localname": "EntityInteractiveDataCurrent", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "yesNoItemType" }, "dei_EntityPrimarySicNumber": { "auth_ref": [ "r12" ], "lang": { "en-us": { "role": { "documentation": "Primary Standard Industrial Classification (SIC) Number for the Entity.", "label": "Entity Primary SIC Number" } } }, "localname": "EntityPrimarySicNumber", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "sicNumberItemType" }, "dei_EntityPublicFloat": { "auth_ref": [], "crdr": "credit", "lang": { "en-us": { "role": { "documentation": "The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter.", "label": "Entity Public Float" } } }, "localname": "EntityPublicFloat", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "monetaryItemType" }, "dei_EntityRegistrantName": { "auth_ref": [ "r14" ], "lang": { "en-us": { "role": { "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.", "label": "Entity Registrant Name" } } }, "localname": "EntityRegistrantName", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityShellCompany": { "auth_ref": [ "r14" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.", "label": "Entity Shell Company" } } }, "localname": "EntityShellCompany", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_EntitySmallBusiness": { "auth_ref": [ "r14" ], "lang": { "en-us": { "role": { "documentation": "Indicates that the company is a Smaller Reporting Company (SRC).", "label": "Entity Small Business" } } }, "localname": "EntitySmallBusiness", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_EntityTaxIdentificationNumber": { "auth_ref": [ "r14" ], "lang": { "en-us": { "role": { "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.", "label": "Entity Tax Identification Number" } } }, "localname": "EntityTaxIdentificationNumber", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "employerIdItemType" }, "dei_EntityVoluntaryFilers": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.", "label": "Entity Voluntary Filers" } } }, "localname": "EntityVoluntaryFilers", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "yesNoItemType" }, "dei_EntityWellKnownSeasonedIssuer": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.", "label": "Entity Well-known Seasoned Issuer" } } }, "localname": "EntityWellKnownSeasonedIssuer", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "yesNoItemType" }, "dei_Extension": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Extension number for local phone number.", "label": "Extension" } } }, "localname": "Extension", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_LocalPhoneNumber": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Local phone number for entity.", "label": "Local Phone Number" } } }, "localname": "LocalPhoneNumber", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "normalizedStringItemType" }, "dei_NoTradingSymbolFlag": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true only for a security having no trading symbol.", "label": "No Trading Symbol Flag" } } }, "localname": "NoTradingSymbolFlag", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_OtherReportingStandardItemNumber": { "auth_ref": [ "r11" ], "lang": { "en-us": { "role": { "documentation": "\"Item 17\" or \"Item 18\" specified when the basis of accounting is neither US GAAP nor IFRS.", "label": "Other Reporting Standard Item Number" } } }, "localname": "OtherReportingStandardItemNumber", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "otherReportingStandardItemNumberItemType" }, "dei_PreCommencementIssuerTenderOffer": { "auth_ref": [ "r5" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.", "label": "Pre-commencement Issuer Tender Offer" } } }, "localname": "PreCommencementIssuerTenderOffer", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_PreCommencementTenderOffer": { "auth_ref": [ "r6" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.", "label": "Pre-commencement Tender Offer" } } }, "localname": "PreCommencementTenderOffer", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_Security12bTitle": { "auth_ref": [ "r0" ], "lang": { "en-us": { "role": { "documentation": "Title of a 12(b) registered security.", "label": "Title of 12(b) Security" } } }, "localname": "Security12bTitle", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "securityTitleItemType" }, "dei_Security12gTitle": { "auth_ref": [ "r3" ], "lang": { "en-us": { "role": { "documentation": "Title of a 12(g) registered security.", "label": "Title of 12(g) Security" } } }, "localname": "Security12gTitle", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "securityTitleItemType" }, "dei_SecurityExchangeName": { "auth_ref": [ "r2" ], "lang": { "en-us": { "role": { "documentation": "Name of the Exchange on which a security is registered.", "label": "Security Exchange Name" } } }, "localname": "SecurityExchangeName", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "edgarExchangeCodeItemType" }, "dei_SecurityReportingObligation": { "auth_ref": [ "r7" ], "lang": { "en-us": { "role": { "documentation": "15(d), indicating whether the security has a reporting obligation under that section of the Exchange Act.", "label": "Security Reporting Obligation" } } }, "localname": "SecurityReportingObligation", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "securityReportingObligationItemType" }, "dei_SolicitingMaterial": { "auth_ref": [ "r8" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.", "label": "Soliciting Material" } } }, "localname": "SolicitingMaterial", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" }, "dei_TradingSymbol": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Trading symbol of an instrument as listed on an exchange.", "label": "Trading Symbol" } } }, "localname": "TradingSymbol", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "tradingSymbolItemType" }, "dei_WrittenCommunications": { "auth_ref": [ "r16" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.", "label": "Written Communications" } } }, "localname": "WrittenCommunications", "nsuri": "http://xbrl.sec.gov/dei/2020-01-31", "presentation": [ "http://axcelis.com/role/Cover" ], "xbrltype": "booleanItemType" } }, "unitCount": 3 } }, "std_ref": { "r0": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "b" }, "r1": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "b-23" }, "r10": { "Name": "Form 10-Q", "Number": "240", "Publisher": "SEC", "Section": "308", "Subsection": "a" }, "r11": { "Name": "Form 20-F", "Number": "249", "Publisher": "SEC", "Section": "220", "Subsection": "f" }, "r12": { "Name": "Form 40-F", "Number": "249", "Publisher": "SEC", "Section": "240", "Subsection": "f" }, "r13": { "Name": "Forms 10-K, 10-Q, 20-F", "Number": "240", "Publisher": "SEC", "Section": "13", "Subsection": "a-1" }, "r14": { "Name": "Regulation 12B", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "b-2" }, "r15": { "Name": "Regulation S-T", "Number": "232", "Publisher": "SEC", "Section": "405" }, "r16": { "Name": "Securities Act", "Number": "230", "Publisher": "SEC", "Section": "425" }, "r17": { "Name": "Securities Act", "Number": "7A", "Publisher": "SEC", "Section": "B", "Subsection": "2" }, "r18": { "Name": "Securities Act", "Number": "Section", "Publisher": "SEC", "Section": "12" }, "r2": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "d1-1" }, "r3": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "g" }, "r4": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "12, 13, 15d" }, "r5": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "13e", "Subsection": "4c" }, "r6": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "14d", "Subsection": "2b" }, "r7": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "15", "Subsection": "d" }, "r8": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "14a", "Subsection": "12" }, "r9": { "Name": "Form 10-K", "Number": "249", "Publisher": "SEC", "Section": "310" } }, "version": "2.1" } ZIP 15 0001104659-21-060958-xbrl.zip IDEA: XBRL DOCUMENT begin 644 0001104659-21-060958-xbrl.zip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