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| 0001140361-22-024066.txt | 2022-06-27 08:19:23 | |
 0001140361-22-024066-xbrl.zip | 21850 | 2022-06-27 08:19:23 |
| brhc10039042_8k.htm | 43586 | 2022-06-27 08:19:23 |
| brhc10039042_8k_htm.xml | 4051 | 2022-06-27 08:19:23 |
| brhc10039042_ex99-1.htm | 16823 | 2022-06-27 08:19:23 |
| entg-20220624.xsd | 3923 | 2022-06-27 08:19:23 |
| entg-20220624_lab.xml | 22544 | 2022-06-27 08:19:23 |
| entg-20220624_pre.xml | 16042 | 2022-06-27 08:19:23 |
| FilingSummary.xml | 1776 | 2022-06-27 08:19:23 |
| Financial_Report.xlsx | 5697 | 2022-06-27 08:19:23 |
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| R1.htm | 38558 | 2022-06-27 08:19:23 |
| report.css | 2767 | 2022-06-27 08:19:23 |
| Show.js | 1085 | 2022-06-27 08:19:23 |