0001140361-22-024066.txt : 20220627 0001140361-22-024066.hdr.sgml : 20220627 20220627081923 ACCESSION NUMBER: 0001140361-22-024066 CONFORMED SUBMISSION TYPE: 8-K PUBLIC DOCUMENT COUNT: 15 CONFORMED PERIOD OF REPORT: 20220624 ITEM INFORMATION: Regulation FD Disclosure ITEM INFORMATION: Financial Statements and Exhibits FILED AS OF DATE: 20220627 DATE AS OF CHANGE: 20220627 FILER: COMPANY DATA: COMPANY CONFORMED NAME: ENTEGRIS INC CENTRAL INDEX KEY: 0001101302 STANDARD INDUSTRIAL CLASSIFICATION: PLASTICS PRODUCTS, NEC [3089] IRS NUMBER: 411941551 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 8-K SEC ACT: 1934 Act SEC FILE NUMBER: 001-32598 FILM NUMBER: 221041624 BUSINESS ADDRESS: STREET 1: 129 CONCORD ROAD CITY: BILLERICA STATE: MA ZIP: 01821 BUSINESS PHONE: 9784366500 MAIL ADDRESS: STREET 1: 129 CONCORD ROAD CITY: BILLERICA STATE: MA ZIP: 01821 8-K 1 brhc10039042_8k.htm 8-K
UNITED STATES
SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
 
FORM 8-K
 
CURRENT REPORT
PURSUANT TO SECTIONS 13 OR 15(d)
OF THE SECURITIES EXCHANGE ACT OF 1934
 
Date of report (Date of earliest event reported) June 27, 2022 (June 24, 2022)
graphic

Entegris, Inc.
(Exact name of registrant as specified in its charter)
 
Delaware
  
001-32598
  
41-1941551
(State or Other Jurisdiction of Incorporation)
  
(Commission File Number)
  
(I.R.S. Employer Identification No.)

129 Concord Road, Billerica, MA
01821
(Address of principal executive offices)
(Zip Code)
 
(978) 436-6500
(Registrant’s telephone number, including area code)
 
N/A
(Former Name or Former Address, if Changed Since Last Report)
 
Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:


☒
Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)
☐
Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)
☐
Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))
☐
Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))
 
Securities registered pursuant to Section 12(b) of the Act:
 
Title of class
Trading Symbol(s)
Name of each exchange on which registered
Common stock, $0.01 par value per share
ENTG
The Nasdaq Stock Market LLC

Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (§230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (§240.12b-2 of this chapter).
 
Emerging growth company ☐
 
If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. ☐
 
Item 7.01
Regulation FD Disclosure.

As previously disclosed, on December 14, 2021, Entegris, Inc. (the “Company” or “Entegris”) and Yosemite Merger Sub, Inc., a wholly owned subsidiary of the Company (“Merger Sub”), entered into an Agreement and Plan of Merger (the “Merger Agreement”) with CMC Materials, Inc. (“CMC”), pursuant to which, on the terms and subject to the conditions set forth therein, Merger Sub will merge with and into CMC (the “Merger”), with CMC surviving the Merger as a wholly owned subsidiary of the Company.

On June 24, 2022, Entegris and CMC issued a joint press release announcing the receipt of all required regulatory clearances for the Merger, a copy of which is attached hereto as Exhibit 99.1 and incorporated herein by reference.

The parties expect to close the Merger on or about July 6, 2022, subject to the satisfaction or waiver of customary closing conditions described in the Merger Agreement.

In accordance with General Instructions B.2 of Form 8-K, the information in this Item 7.01 shall not be deemed “filed” for purposes of Section 18 of the Securities Exchange Act of 1934, as amended, or otherwise subject to the liabilities of that section, nor shall such information be deemed incorporated by reference in any filing under the Securities Act of 1933, as amended, except as shall be expressly set forth by specific reference in such a filing. The information set forth herein will not be deemed an admission as to the materiality of any information required to be disclosed solely to satisfy the requirements of Regulation FD.

Item 9.01.
Financial Statements and Exhibits.
 
(d) Exhibits
 
99.1
Press Release, dated June 24, 2022, relating to China Antitrust Clearance.
104
Cover Page Interactive Date File (embedded within the Inline XBRL document)
* * *

Additional Information about the Acquisition and Where to Find It

This communication does not constitute an offer to buy or sell or the solicitation of an offer to buy or sell any securities or a solicitation of any vote or approval. This communication relates to a proposed business combination between Entegris and CMC. In connection with the proposed transaction, Entegris filed with the Securities and Exchange Commission (the “SEC”) a registration statement on Form S-4 (the “Registration Statement”) that included a proxy statement of CMC and that also constitutes a prospectus of Entegris. Each of Entegris and CMC may also file other relevant documents with the SEC regarding the proposed transaction. This document is not a substitute for the proxy statement/prospectus or Registration Statement or any other document that Entegris or CMC may file with the SEC. The Registration Statement was declared effective by the SEC on January 28, 2022 and CMC commenced mailing of the definitive proxy statement/prospectus to its stockholders on or about January 28, 2022. INVESTORS AND SECURITY HOLDERS ARE URGED TO READ THE REGISTRATION STATEMENT, PROXY STATEMENT/PROSPECTUS AND OTHER DOCUMENTS THAT MAY BE FILED WITH THE SEC, AS WELL AS ANY AMENDMENTS OR SUPPLEMENTS TO THESE DOCUMENTS, CAREFULLY AND IN THEIR ENTIRETY BECAUSE THEY WILL CONTAIN IMPORTANT INFORMATION ABOUT THE PROPOSED TRANSACTION. Investors and security holders will be able to obtain free copies of these documents and other documents containing important information about Entegris and CMC, once such documents are filed with the SEC through the website maintained by the SEC at http://www.sec.gov. Copies of the documents filed with the SEC by Entegris are available free of charge on Entegris’ website at http://Entegris.com or by contacting Entegris’ Investor Relations Department by email at irelations@Entegris.com or by phone at +1 978-436-6500. Copies of the documents filed with the SEC by CMC will be available free of charge on CMC’s website at www.CMCmaterials.com/investors or by contacting CMC’s Investor Relations Department by email at investors@CMCmaterials.com by phone at +1 630-499-2600.

Cautionary Note on Forward Looking Statements

This communication may contain statements that are not historical facts and are “forward-looking statements” within the meaning of U.S. securities laws.  The words “believe,” “continue,” “could,” “expect,” “anticipate,” “intends,” “estimate,” “forecast,” “project,” “should,” “may,” “will,” “would” or the negative thereof and similar expressions are intended to identify such forward-looking statements. These forward-looking statements may include statements about: the ability of Entegris and Entegris Escrow Corporation to consummate the proposed notes offering; the impact of the COVID-19 pandemic on Entegris’ operations and markets, including supply chain issues related thereto; future period guidance or projections; Entegris’ performance relative to its markets, including the drivers of such performance; market and technology trends, including the duration and drivers of any growth trends and the impact of the COVID-19 pandemic on such trends; the development of new products and the success of their introductions; the focus of Entegris’ engineering, research and development projects; Entegris’ ability to execute on its business strategies, including with respect to Entegris’ expansion of its manufacturing presence in Taiwan; Entegris’ capital allocation strategy, which may be modified at any time for any reason, including share repurchases, dividends, debt repayments and potential acquisitions; the impact of the acquisitions Entegris has made and commercial partnerships it has established; future capital and other expenditures, including estimates thereof; Entegris’ expected tax rate; the impact, financial or otherwise, of any organizational changes; the impact of accounting pronouncements; quantitative and qualitative disclosures about market risk; anticipated leadership, operating model, results of operations, and business strategies of Entegris, CMC and the combined company; anticipated benefits of the proposed transaction; the anticipated impact of the proposed transaction on Entegris’ and CMC’s business and future financial and operating results; the expected amount and timing of synergies from the proposed transaction; the anticipated closing date for the proposed transaction and other aspects of CMC’s and Entegris’ operations or operating results; and other matters.

These forward-looking statements are based on current management expectations and assumptions only as of the date of this communication, are not guarantees of future performance and involve known and unknown risks and uncertainties (many of which are beyond Entegris’ and CMC’s control and are difficult to predict) that could cause actual results of Entegris, CMC and/or the combined company following the closing of proposed transaction to differ materially and adversely from the results expressed in, or implied by, these forward-looking statements.  These risks and uncertainties include, but are not limited to: (i) weakening of global and/or regional economic conditions, generally or specifically in the semiconductor industry, which could decrease the demand for Entegris’ and CMC’s products and solutions; (ii) Entegris’ and CMC’s ability to meet rapid demand shifts; (iii) Entegris’ and CMC’s ability to continue technological innovation and introduce new products to meet customers’ rapidly changing requirements; (iv) Entegris’ and CMC’s ability to protect and enforce intellectual property rights; (v) operational, political and legal risks of Entegris’ and CMC’s international operations; (vi) Entegris’ debt profile after giving effect to the proposed transaction; (vii) the increasing complexity of certain manufacturing processes; (viii) raw material shortages, supply and labor constraints and price increases; (ix) changes in government regulations of the countries in which Entegris and CMC operate; (x) the imposition of tariffs, export controls and other trade laws and restrictions and changes foreign and national security policy, especially as they relate to China and as may arise with respect to recent developments regarding Russia and Ukraine; (xi) the fluctuation of currency exchange rates; fluctuations in the market price of Entegris’ stock; (xii) the level of, and obligations associated with, Entegris’ indebtedness, including the notes, and the risks related to holding the notes; (xiii) the impact of public health crises, such as pandemics (including coronavirus (COVID-19)) and epidemics and any related company or government policies and actions to protect the health and safety of individuals or government policies or actions to maintain the functioning of national or global economies and markets; (xiv) the ongoing conflict between Russia and Ukraine and the global response to it; and (xv) the other risk factors and additional information described in Entegris’ filings with the SEC. In addition, risks that could cause actual results to differ from forward-looking statements include: the inherent uncertainty associated with financial or other projections; the prompt and effective integration of CMC’s businesses and the ability to achieve the anticipated synergies and value-creation contemplated by the proposed transaction; the risk associated with the timing of the closing of the proposed transaction, including the risk that the conditions to the proposed transaction are not satisfied on a timely basis or at all and the failure of the proposed transaction to close for any other reason; unanticipated difficulties or expenditures relating to the proposed transaction, the outcome of any legal proceedings related to the proposed transaction, the response and retention of business partners and employees as a result of the announcement and pendency of the proposed transaction; and the diversion of management time on transaction-related issues. These risks, as well as other risks related to the proposed transaction, are included in the Registration Statement, as amended, and proxy statement/prospectus that were filed with the SEC on January 28, 2022 in connection with the proposed transaction.  While the list of factors presented here is, and the list of factors to be presented in the Registration Statement, as amended, and proxy statement/prospectus are, are considered representative, no such list should be considered to be a complete statement of all potential risks and uncertainties. For a more detailed discussion of such risks and other factors, see Entegris’ and CMC’s filings with the Securities and Exchange Commission, including under the heading “Risks Factors” in Item 1A of Entegris’ Annual Report on Form 10-K for the fiscal year ended December 31, 2021, which was filed with the SEC on February 4, 2022, Entegris’ Quarterly Report on Form 10-Q for the fiscal quarter ended April 2, 2022, which was filed with the SEC on April 26, 2022, CMC’s Annual Report on Form 10-K for the fiscal year ended September 30, 2021, which was filed with the SEC on November 12, 2021 and amended by the Form 10-K/A filed with the SEC on January 19, 2022, CMC’s Quarterly Report on Form 10-Q for the fiscal quarter ended December 31, 2021, which was filed with the SEC on February 3, 2022 and CMC’s Quarterly Report on Form 10-Q for the fiscal quarter ended March 31, 2022, which was filed with the SEC on May 5, 2022, and in other periodic filings, available on the SEC website or www.entegris.com or www.cmcmaterials.com. Entegris and CMC assume no obligation to update any forward-looking statements or information, which speak as of their respective dates, to reflect events or circumstances after the date of this communication, or to reflect the occurrence of unanticipated events, except as may be required under applicable securities laws. Investors should not assume that any lack of update to a previously issued “forward-looking statement” constitutes a reaffirmation of that statement.
 
SIGNATURE
Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.

 
ENTEGRIS, INC.
Dated: June 27, 2022
  
 
By: /s/ Joseph Colella
 
Name: Joseph Colella
 
Title: Senior Vice President, General Counsel and Secretary


EX-99.1 2 brhc10039042_ex99-1.htm EXHIBIT 99.1
Exhibit 99.1



Entegris and CMC Materials Receive China Antitrust Clearance for Pending Acquisition

June 24, 2022

Transaction Expected to Close on July 6, 2022

BILLERICA, Mass. & AURORA, Ill.--(BUSINESS WIRE)--Jun. 24, 2022-- Entegris, Inc. (NASDAQ: ENTG) and CMC Materials, Inc. (NASDAQ: CCMP) today announced that China’s State Administration for Market Regulation has given antitrust clearance for Entegris’ previously announced acquisition of CMC Materials. The transaction has now received all required regulatory clearances. Entegris and CMC Materials anticipate that the transaction will close on or about July 6, 2022, subject to the satisfaction of the remaining customary closing conditions.

The parties announced their agreement for Entegris to acquire CMC Materials in a cash and stock transaction on December 15, 2021. The transaction brings together two highly complementary portfolios, creating the industry’s most comprehensive and innovative electronic materials offering.

About Entegris

Entegris is a world-class supplier of advanced materials and process solutions for the semiconductor and other high-tech industries. Entegris has approximately 6,800 employees throughout its global operations and is ISO 9001 certified. It has manufacturing, customer service and/or research facilities in the United States, Canada, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

About CMC Materials, Inc.

CMC Materials, Inc., headquartered in Aurora, Illinois, is a leading global supplier of consumable materials primarily to semiconductor manufacturers. The company’s products play a critical role in the production of advanced semiconductor devices, helping to enable the manufacture of smaller, faster and more complex devices by its customers. CMC Materials, Inc. is also a leading provider of performance materials to pipeline operators. The company’s mission is to create value by delivering high-performing and innovative solutions that solve its customers’ challenges. The company has approximately 2,200 employees globally. For more information about CMC Materials, Inc., visit www.cmcmaterials.com, or contact Colleen Mumford, Vice President, Communications and Marketing, at 630-499-2600.

Additional Information about the Acquisition and Where to Find It

This communication does not constitute an offer to buy or sell or the solicitation of an offer to buy or sell any securities or a solicitation of any vote or approval. This communication relates to a proposed business combination between Entegris and CMC. In connection with the proposed transaction Entegris filed with the Securities and Exchange Commission (the “SEC”) a registration statement on Form S-4 (the “Registration Statement”) that included a proxy statement of CMC and that also constitutes a prospectus of Entegris. Each of Entegris and CMC may also file other relevant documents with the SEC regarding the proposed transaction. This document is not a substitute for the proxy statement/prospectus or Registration Statement or any other document that Entegris or CMC may file with the SEC. The Registration Statement was declared effective by the SEC on January 28, 2022 and CMC commenced mailing of the definitive proxy statement/prospectus to its stockholders on or about January 28, 2022. INVESTORS AND SECURITY HOLDERS ARE URGED TO READ THE REGISTRATION STATEMENT, PROXY STATEMENT/PROSPECTUS AND OTHER DOCUMENTS THAT MAY BE FILED WITH THE SEC, AS WELL AS ANY AMENDMENTS OR SUPPLEMENTS TO THESE DOCUMENTS, CAREFULLY AND IN THEIR ENTIRETY BECAUSE THEY WILL CONTAIN IMPORTANT INFORMATION ABOUT THE PROPOSED TRANSACTION. Investors and security holders will be able to obtain free copies of these documents and other documents containing important information about Entegris and CMC, once such documents are filed with the SEC through the website maintained by the SEC at http://www.sec.gov. Copies of the documents filed with the SEC by Entegris are available free of charge on Entegris’ website at http://Entegris.com or by contacting Entegris’ Investor Relations Department by email at irelations@Entegris.com or by phone at +1 978-436-6500. Copies of the documents filed with the SEC by CMC will be available free of charge on CMC’s website at www.CMCmaterials.com/investors or by contacting CMC’s Investor Relations Department by email at investors@CMCmaterials.com by phone at +1 630-499-2600.

Cautionary Note on Forward Looking Statements

This communication may contain statements that are not historical facts and are “forward-looking statements” within the meaning of U.S. securities laws.  The words “believe,” “continue,” “could,” “expect,” “anticipate,” “intends,” “estimate,” “forecast,” “project,” “should,” “may,” “will,” “would” or the negative thereof and similar expressions are intended to identify such forward-looking statements. These forward-looking statements may include statements about: the ability of Entegris and the Entegris Escrow Corporation to consummate the proposed notes offering; the impact of the COVID-19 pandemic on Entegris’ operations and markets, including supply chain issues related thereto; future period guidance or projections; Entegris’ performance relative to its markets, including the drivers of such performance; market and technology trends, including the duration and drivers of any growth trends and the impact of the COVID-19 pandemic on such trends; the development of new products and the success of their introductions; the focus of Entegris’ engineering, research and development projects; Entegris’ ability to execute on its business strategies, including with respect to Entegris’ expansion of its manufacturing presence in Taiwan; Entegris’ capital allocation strategy, which may be modified at any time for any reason, including share repurchases, dividends, debt repayments and potential acquisitions; the impact of the acquisitions Entegris has made and commercial partnerships it has established; future capital and other expenditures, including estimates thereof; Entegris’ expected tax rate; the impact, financial or otherwise, of any organizational changes; the impact of accounting pronouncements; quantitative and qualitative disclosures about market risk; anticipated leadership, operating model, results of operations, and business strategies of Entegris, CMC and the combined company; anticipated benefits of the proposed transaction; the anticipated impact of the proposed transaction on Entegris’ and CMC’s business and future financial and operating results; the expected amount and timing of synergies from the proposed transaction; the anticipated closing date for the proposed transaction and other aspects of CMC’s and Entegris’ operations or operating results; and other matters.

These forward-looking statements are based on current management expectations and assumptions only as of the date of this communication, are not guarantees of future performance and involve known and unknown risks and uncertainties (many of which are beyond Entegris’ and CMC’s control and are difficult to predict) that could cause actual results of Entegris, CMC and/or the combined company following the closing of proposed transaction to differ materially and adversely from the results expressed in, or implied by, these forward-looking statements.  These risks and uncertainties include, but are not limited to: (i) weakening of global and/or regional economic conditions, generally or specifically in the semiconductor industry, which could decrease the demand for Entegris’ and CMC’s products and solutions; (ii) Entegris’ and CMC’s ability to meet rapid demand shifts; (iii) Entegris’ and CMC’s ability to continue technological innovation and introduce new products to meet customers’ rapidly changing requirements; (iv) Entegris’ and CMC’s ability to protect and enforce intellectual property rights; (v) operational, political and legal risks of Entegris’ and CMC’s international operations; (vi) Entegris’ debt profile after giving effect to the proposed transaction; (vii) the increasing complexity of certain manufacturing processes; (viii) raw material shortages, supply and labor constraints and price increases; (ix) changes in government regulations of the countries in which Entegris and CMC operate; (x) the imposition of tariffs, export controls and other trade laws and restrictions and changes foreign and national security policy, especially as they relate to China and as may arise with respect to recent developments regarding Russia and Ukraine; (xi) the fluctuation of currency exchange rates; fluctuations in the market price of Entegris’ stock; (xii) the level of, and obligations associated with, Entegris’ indebtedness, including the notes, and the risks related to holding the notes; (xiii) the impact of public health crises, such as pandemics (including coronavirus (COVID-19)) and epidemics and any related company or government policies and actions to protect the health and safety of individuals or government policies or actions to maintain the functioning of national or global economies and markets; (xiv) the ongoing conflict between Russia and Ukraine and the global response to it; and (xv) the other risk factors and additional information described in Entegris’ filings with the SEC. In addition, risks that could cause actual results to differ from forward-looking statements include: the inherent uncertainty associated with financial or other projections; the prompt and effective integration of CMC’s businesses and the ability to achieve the anticipated synergies and value-creation contemplated by the proposed transaction; the risk associated with the timing of the closing of the proposed transaction, including the risk that the conditions to the proposed transaction are not satisfied on a timely basis or at all and the failure of the proposed transaction to close for any other reason; unanticipated difficulties or expenditures relating to the proposed transaction, the outcome of any legal proceedings related to the proposed transaction, the response and retention of business partners and employees as a result of the announcement and pendency of the proposed transaction; and the diversion of management time on transaction-related issues. These risks, as well as other risks related to the proposed transaction, are included in the Registration Statement, as amended, and proxy statement/prospectus that were filed with the SEC on January 28, 2022 in connection with the proposed transaction.  While the list of factors presented here is, and the list of factors to be presented in the Registration Statement, as amended, and proxy statement/prospectus are, are considered representative, no such list should be considered to be a complete statement of all potential risks and uncertainties. For a more detailed discussion of such risks and other factors, see Entegris’ and CMC’s filings with the Securities and Exchange Commission, including under the heading “Risks Factors” in Item 1A of Entegris’ Annual Report on Form 10-K for the fiscal year ended December 31, 2021, which was filed with the SEC on February 4, 2022, Entegris’ Quarterly Report on Form 10-Q for the fiscal quarter ended April 2, 2022, which was filed with the SEC on April 26, 2022, CMC’s Annual Report on Form 10-K for the fiscal year ended September 30, 2021, which was filed with the SEC on November 12, 2021 and amended by the Form 10-K/A filed with the SEC on January 19, 2022, CMC’s Quarterly Report on Form 10-Q for the fiscal quarter ended December 31, 2021, which was filed with the SEC on February 3, 2022 and CMC’s Quarterly Report on Form 10-Q for the fiscal quarter ended March 31, 2022, which was filed with the SEC on May 5, 2022, and in other periodic filings, available on the SEC website or www.entegris.com or www.cmcmaterials.com. Entegris and CMC assume no obligation to update any forward-looking statements or information, which speak as of their respective dates, to reflect events or circumstances after the date of this communication, or to reflect the occurrence of unanticipated events, except as may be required under applicable securities laws. Investors should not assume that any lack of update to a previously issued “forward-looking statement” constitutes a reaffirmation of that statement.

View source version on businesswire.com: https://www.businesswire.com/news/home/20220624005236/en/

Bill Seymour
Vice President of Investor Relations and Treasury
(952) 556-1844
bill.seymour@entegris.com

Source: Entegris, Inc. and CMC Materials, Inc.

 EX-101.SCH 3 entg-20220624.xsd XBRL TAXONOMY EXTENSION SCHEMA 000100 - Document - Document and Entity Information link:presentationLink link:calculationLink link:definitionLink EX-101.LAB 4 entg-20220624_lab.xml XBRL TAXONOMY EXTENSION LABEL LINKBASE Cover [Abstract] Document Type Written Communications Soliciting Material Pre-commencement Tender Offer Pre-commencement Issuer Tender Offer Amendment Flag Document Fiscal Year Focus Document Fiscal Period Focus Document Period End Date Entity Registrant Name Entity Central Index Key Entity File Number Entity Tax Identification Number Entity Incorporation, State or Country Code Entity Emerging Growth Company Entity Address, Address Line One Entity Address, Address Line Two Entity Address, Address Line Three Entity Address, City or Town Entity Address, State or Province Entity Address, Country Entity Address, Postal Zip Code City Area Code Local Phone Number Title of 12(b) Security No Trading Symbol Flag Trading Symbol Security Exchange Name EX-101.PRE 5 entg-20220624_pre.xml XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE GRAPHIC 6 image00001.jpg begin 644 image00001.jpg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end GRAPHIC 7 image00002.jpg begin 644 image00002.jpg M_]C_X 02D9)1@ ! 0$ 8 !@ #_VP!# 8$!08%! 8&!08'!P8("A *"@D) M"A0.#PP0%Q08&!<4%A8:'24?&ALC'!86("P@(R8G*2HI&1\M,"TH,"4H*2C_ MVP!# 0<'!PH("A,*"A,H&A8:*"@H*"@H*"@H*"@H*"@H*"@H*"@H*"@H*"@H M*"@H*"@H*"@H*"@H*"@H*"@H*"@H*"C_P 1" "$ -H# 2( A$! Q$!_\0 M'P 04! 0$! 0$ $" P0%!@<("0H+_\0 M1 @$# P($ P4% M! 0 %] 0(# 01!1(A,4$&$U%A!R)Q%#*!D:$((T*QP152T? D,V)R@@D* M%A<8&1HE)B7J#A(6&AXB)BI*3E)66EYB9FJ*CI*6FIZBIJK*SM+6VM[BYNL+#Q,7& MQ\C)RM+3U-76U]C9VN'BX^3EYN?HZ>KQ\O/T]?;W^/GZ_\0 'P$ P$! 0$! M 0$! 0 $" P0%!@<("0H+_\0 M1$ @$"! 0#! <%! 0 0)W $" M Q$$!2$Q!A)!40=A<1,B,H$(%$*1H;'!"2,S4O 58G+1"A8D-.$E\1<8&1HF M)R@I*C4V-S@Y.D-$149'2$E*4U155E=865IC9&5F9VAI:G-T=79W>'EZ@H.$ MA8:'B(F*DI.4E9:7F)F:HJ.DI::GJ*FJLK.TM;:WN+FZPL/$Q<;'R,G*TM/4 MU=;7V-G:XN/DY>;GZ.GJ\O/T]?;W^/GZ_]H # ,! (1 Q$ /P#ZIHHHH ** M** "BBB@ HHKAO'GQ*T?PGNMR3>ZECBVB.-O^\W1?U/M4RDHJ\C6C0J5Y\E) M79W-9\^N:3!)LGU2QC?.-KW"*?U-?+7BCXD>(_$#2)->&WM6)Q!!\J@>A/4U MR#32NC(P8'\14E?' MGA'QGK'A>^2>QN7>'=F2WD8E)!Z$5]8>&M9M_$&AV>IV>1%<(&VGJA[J?<'B MMJ-95/4\S,LJJ8%IMWB^IIT445L>4%%%% !1110 4444 %%%% !1110 4444 M %%%% !1110 4444 %%%<9\4_&">$?#KR1,#J-P"ELF,X/=C["E*2BKLUHT9 MUZBIP6K.9^+_ ,3#H!?2-"<'4R/WLPY$'L/5OY5\]PQ7NK:@$A2:[O9WX"@N M[L:;_I6IZA_RTN+NXD_WF=B?YYKZ@^%7@"#PEIJ7%VB2:Q,H,K]?*S_ O]37 MG)2Q$]=C[24J&28=)*\W^+_R.0\!_!:-(X[OQ8V^1AD6<;<)_O,.I]AQ[UZB M-+\.:!9 M:Z=96T:]755&![GK6-\3O'EOX,TY0B+<:G.#Y,). /]IO8>G>N) M\"^#+[QLB^(O&]U-<03_ #V]KO(!7/!('1?0>E=*48/D@KL\.I>*[72_#W@?67M;.WMHELY%"Q1AZ9KC'L3Q^@%+DE[6Z>MC5XNE+ .,HMQ4DE=Z[>2'I\5/#Z@&^B MU2P':N#X@\/*<&X0XFA&>K?YQ[BO1_#FOZ=XCTU+W2;A9H6ZCHR'T8=C3 MC44G;9DU\).E'VB?-%]5M\^S]34HHHJSD"BBB@ HHHH **** "BBB@ HHHH M**** "BBB@ KY/\ C!XB;Q!XTO-CYM;1S;PC/&%."?Q.37U%KMRUEHM_=(<- M# \@/N%)KXHRTLN6)+.V23W)KCQDM%$^HX:H*4YUGTT7S/;?V>?":RF7Q%>Q MAE5C%:AAGD?>;^GYU[Q6)X)TU-(\(Z191@#RK9-WNQ&6/YDUMUT4H^#]&GL\>2UI&H M_APH!'X$$?A7B7[07A6:TUD:_;IFSNL),1_!(!CD>AQ^=8'PW^)=[X0MY;.: M$WE@P+1QEL&-_4'T]17)&?LJKY^I]%B,*\PP%)X?>/3\&>L_%:XD\0:CIW@W M36S/=2++=LIXBB'//\Z])L[:*SM(;:W4)#"BQHH[*!@"O._@W:6]U97'B"[O M;>]UO46,DYC;)A4]$QVKTFNJGK[[ZGSV-:IVPT=H;^;>[_1!1116IP#)XHYX M7BG19(G4JR,,A@>H-?.%U>3_ I^)DT=KN?2I2&:'/WHF_\ 9AV^E?15_>VV MGVDES>S)!;QJ6=W. *^2/B5XE'BGQ7=7\086P_=PANNP=#^/6N7%244FMSZ M'(*,JTYPDKTVM?7I\SZ\@FCN((YH6#Q2*'1AT(/(-/KFOAJLR^ ]"%R&$GV1 M,[NN,%5A[.I*"Z.P4444S,**** "BBB@ HHHH **** "BN!^ M)>J^*M';[9H4,#:9% &G=PI*MN.>,@XQMKS>S^*7BR\NHK>W-HTTK!$7RL9) M_&I/QH MY@Y3U_7K5K[1+^TCY>>!XU^I4BOBEE>"X*RJ5>-L,IZ@@\BOLGP5J,^K^%=. MO[PJ;B>/:VD.T,WF3Z''UKGQ-- MS2E$]_(WX M9->+:U\*O$VG:/'J1LTE5EWR6\+[Y81Z$=_^ YKZ \&^!M'\*P@V<7G7A^_= MS#,C'OSV'M74TY4?::S)H9HL#[F%5UU;Z^BZ?F?$EAJ%_I%UYEE<3VDZ'!*, M5(/O7>:/\9/%%@$6XDM[Y%&/W\>&/XC%>]>(/ _A[7]S:AIL)E8Y,L8V/^8K MSO5/@19R'.EZO-#S]V:(/^H(_E6'L*M/X&>NLWR_%K_:86?FK_BM3(3X\Z@% M^?1;5CZB9A_2JE_\=-;FB*V>G65LQZ.Q9R/Y5/)\!]5#?N]6L2/]H./Z5/:_ M 6\9A]JUJW0=_+B9OYXH_P!H>@T\EC[VGXGF7B3Q;K?B23.KW\DR Y$8^5!^ M KH?AG\/+_Q3J$%S=0O!HR,&DF<8\T _=3USZ]!7L?AWX0>&])=9;J.34)E. M09S\O_?(KT2&-(8UCB14C4855& !50PS;YJC.?%Y]3A3]E@XV\]ON01QK%&L M<:A44!54#@ =J=117:?*A1110 445'--% NZ>1(U]78 ?K0!)138Y$E0-$ZN MIZ%3D4Z@ HHHH **** .=^(G_(D:S_U[M7S9X1_Y&?2_^OA/YU])_$3_ )$C M6?\ KW:OFSPE_P C-I?_ %\)_.LY[HTAL?6M9WB'2;?7-'N=/N_]7,NWQ'TJ])-'$I:21%"\DLV,5S_ ($U^7Q'H\U[,L2XN9(D\L$ HI^4\GKBK\B/ M,T?#>E+HFAV>FI*9EMTV>85V[O?%:5>9_$KQ3XI\-7TDUE:6QT?Y52:1=QW$ MOM67X'^)]U>SWTGB.2UBM+>#S!Y289F]!SR:7,MA\K>I[!17E%QXR\9 MZO9RW_A_04@TU 762?YG=!W )&?PS^-5/!OQ1V]Z4I:V'&.ESZJHKFM U;4+7PN]_XQ6*RGB+&3 P H/'0FN8T[ MQKKOB^^N8/"-G:6UI#C==7Q)/_?*]#[8ZOXT\0^#KNWC\4V5E> M6DV=MQ9,5/OPW<>G'UKT+2-2M=7T^&]L)1+;RKN5A_(^]"8-%RBN7\=>,;/P ME8"29?/NY.(;=6P6]R>PKA?#_C7QUKIEO=-TBTN+&,G*8V9]@2W)HTGTB&.WOO-,=S:W*EFC(';IQGO47@;QMXO\2:M"L=K:26$ MGIFES+8?*[7/8J*\2\5>/_ !EX>U)K>]M;.%'):'='NW)G M@\-6QH?Q+G3P5>:OK$<,MVL_D6\,(V[SC(SR>.N3[4:U96[.\8EE5"R'!&3U%?3?Q$_Y$C6? M^O=J^;/"7_(SZ7_U\)_.LY[HTAL>TZI\*(;BWF^SZWJ(E8$@SOO!/OTJ]\%8 M7MO![P28WQ7Y%W:QP/QT_P"1 M';_KX3^=>/?#?18]>\6VEI<*6MAF251W4=J]A^.G_(CM_P!?"?SKS_X#?\CE M+_UZO_,5$OB+C\)] QQI%$L<:JL:C:J@8 'I7R/XAC6W\1ZE'&,+'=2*H'8! MS7UU7R1XJ_Y&C5_^OR;_ -#-$P@>S?$Z=KKX26-Q)R\J6TC?4@&O//@S_P C M]8_[C_\ H-=[\0O^2,Z5_P!<+3_T%:X+X,_\C]8_[C_^@TG\2&OA9TOQZU^2 M2_@T2%B(HE$LP!^\QZ#\!75_ N!8O!/F@ --<.Q/KCC^E>3?%@LWCW5-W]\ M?3 KKOAUHOBR]\*PRZ+KT-E9-(^V%DR0H7FD2$F.5/.C&?ND=>*W-3\%>--3L9K.^\2VTUM* M '1D.#@Y'\/J*;X'^&^H^%]?34YK^VECCB=2D:MELKQU%/6]Q:6L>6?$#7)- M?\47ETS9B5S'"/1!TKZ/\%V$>F^%=+MHEP%MT+>[$9)_,FODYNIS7V#I/_(* ML\=/)3_T$4H;W'/:QX?\>M)CM-=M+^%57[6A$F.[+W_6MG]GG_CUU?\ WT_E M3/VAONZ-]9/Z4_\ 9Y_X]=7_ -]/Y4?:#[)F_M"?\AG2O^N#?^A5!\#=(BU. M_OYKP&2&"(QK&>F7!!/Y9_.IOVA#_P 3K2O^N#?^A5J?L\C_ $35S_MI_(T? M:#[)3@^#=XNO*TE];'2UEWY&[S&7.<8QC/XU>_:%&-/T<#IYK_RKUZO(?VAO M^0?I'_75_P"5-I):"3;>IG?L]?\ (2U;_KBO\ZXOQM+=:=\0;^XD'^D0W?G) MOY!P05_#I7:?L]?\A+5O^N*_SKL?B7\/T\4A;RQE6#4XUVC>/DE'H?0^]*UX MZ#O:6H>$_B?HVLI%#>O_ &?>D8*RGY"?9O\ '%:7C_PE!XQTJ&-)TAN(GWQ3 M[=PQW'T-?.FN^']4T&X,6JV"_'FJ^&KJ-?-:ZT_.'MY& MR,?[)[&CFZ,.7JCZ4TVV^QZ?;6V[=Y,:Q[L8S@8JS5/1]2MM7TZ&]L9-\$JA M@>X]C[U=I.,;:\VB^$GBB&59(WL5=3N4B8\'_OFLY7;-(V2/H6L M[Q%JD6BZ+>7\S*!!&6 ;^)L<#\37"QVWQ.2)4^U:0V!CM8'P&_Y'*7_KU?\ F*[.Z\#ZM+\+K30%-M]OBF,C9D.S&\GKCT/I7,:% M\.?&>AWZWFF7-C!.!MW"7/!ZC!7%2T[IE:6:/=Z^2/%7_(T:O_U^3?\ H9KZ MRM!*+2$7)!G"*)".A;'/ZUX5KGPJ\17NM7]U";+RI[B25-TI!PS$C/R^].:; M%!I'3^/H7D^"^FE%R([:U9O8;5KSWX-G'CZQS_=?_P!!KU;PMX9UR3PS?:)X MKN8I;5HEAM_*()C4#'7 Z<=?2N(A^%OBC1-6CN]%O;-WB;,[4*Q ^ZZC&/Q%=I\![V.?PA):AAYMO.VY>X# M<@_SKX5R[@=]O)Y_SFNE\'>&;7POIGV:W=IIG.Z:=QAI&]?8>U5?J% /ZUC_$ M#P/:^+;96\S[-?Q#$%]+^(/A:V;3[.VTZ[M1O?:5:*V<8_D:N_L\_\ 'KJ_^^G\JY/XJ:'> MZ;)97NMWXN]5O=S2J@PD8'15]N?:NR_9[MW72]4G(PCS*JGUP.:2^(;^$QOV MA/\ D-Z5_P!<&_\ 0JU/V>?^//5_^NB?R-:?Q8\$ZKXIU*QGTPVX2&(HWFN5 M.2<^AK)\#^"O&7AK5(6AN;*.QDF0W2*^XN@(SC*]<9HL^:X77+8]CKR']H;_ M )!^D?\ 75_Y5Z]7 ?%GPIJ/BFUT^/2_(W0NS/YK[>H^AJI;$QW./_9Z_P"0 MEJW_ %Q7^==GH/CLWGCG4= OT@@6-VCMG7(+D'H$? GC/PWJ2SV-S M8Q1R,JS@/NW(&!(Y6KVL?#'4M3\6:IJD-_%8JTGG6K)EF+\=>FWGN,TE=(IV M;/5;ZRMK^V>WO8(YX7&&1UR#7SY\7/!UMX9O[>XTYL6EV6Q$>L;#&0/;FO1- M,N_B'I\TNRU54X687 C8^Y)Z_E69>>"O$?C/68;SQ9+;V-E#PEM V]L= MP.PSZY_"B6J%'1FM\"TF7P7)YX(#73&//]W8F/ZUZ)4-G;0V=K';VL:Q0QJ% M1%& *FJDK(EN["BBBF(**** "BBB@ HHHH **** "BBB@ HHHH *"0 23@# MDDUA>,M??P[I(O(K)KUVD$8B$FSKWS@UYIJFH>._&T;6MC8QZ=8MPY63!8'L MS9R1]!2;L-*YR/Q2UX>)?%K"R_>6\'[B#:/O\\G\37N7P\T!O#GA:ULI@/M) M'F38.<.>H_#I7/> OAE:^'ITOM2E6\U!>4 7$<9]1GDGWX^E>BTHKJQR?1!1 M115$A1110 4444 %%%% !1110 4444 %%%% !1110 4444 %%%% !1110 44 A44 %%%% !1110 4444 %%%% !1110 4444 %%%% '__9 end XML 8 R1.htm IDEA: XBRL DOCUMENT v3.22.2
Document and Entity Information
Jun. 24, 2022
Cover [Abstract]  
Document Type 8-K
Amendment Flag false
Document Period End Date Jun. 24, 2022
Entity Registrant Name Entegris, Inc.
Entity Incorporation, State or Country Code DE
Entity File Number 001-32598
Entity Tax Identification Number 41-1941551
Entity Address, Address Line One 129 Concord Road
Entity Address, City or Town Billerica
Entity Address, State or Province MA
Entity Address, Postal Zip Code 01821
City Area Code 978
Local Phone Number 436-6500
Written Communications true
Soliciting Material false
Pre-commencement Tender Offer false
Pre-commencement Issuer Tender Offer false
Entity Emerging Growth Company false
Entity Central Index Key 0001101302
Title of 12(b) Security Common stock, $0.01 par value per share
Trading Symbol ENTG
Security Exchange Name NASDAQ
XML 9 brhc10039042_8k_htm.xml IDEA: XBRL DOCUMENT 0001101302 2022-06-24 2022-06-24 false 0001101302 8-K 2022-06-24 Entegris, Inc. DE 001-32598 41-1941551 129 Concord Road Billerica MA 01821 978 436-6500 true false false false Common stock, $0.01 par value per share ENTG NASDAQ false EXCEL 10 Financial_Report.xlsx IDEA: XBRL DOCUMENT begin 644 Financial_Report.xlsx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end XML 11 Show.js IDEA: XBRL DOCUMENT // Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission. Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105. var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0); e.removeAttribute('id');a.parentNode.appendChild(e)}} if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'} e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}} XML 12 report.css IDEA: XBRL DOCUMENT /* Updated 2009-11-04 */ /* v2.2.0.24 */ /* DefRef Styles */ ..report table.authRefData{ background-color: #def; border: 2px solid #2F4497; font-size: 1em; position: absolute; } ..report table.authRefData a { display: block; font-weight: bold; } ..report table.authRefData p { margin-top: 0px; } ..report table.authRefData .hide { background-color: #2F4497; padding: 1px 3px 0px 0px; text-align: right; } ..report table.authRefData .hide a:hover { background-color: #2F4497; } ..report table.authRefData .body { height: 150px; overflow: auto; width: 400px; } ..report table.authRefData table{ font-size: 1em; } /* Report Styles */ ..pl a, .pl a:visited { color: black; text-decoration: none; } /* table */ ..report { background-color: white; border: 2px solid #acf; clear: both; color: black; font: normal 8pt Helvetica, Arial, san-serif; margin-bottom: 2em; } ..report hr { border: 1px solid #acf; } /* Top labels */ ..report th { background-color: #acf; color: black; font-weight: bold; text-align: center; } ..report th.void { background-color: transparent; color: #000000; font: bold 10pt Helvetica, Arial, san-serif; text-align: left; } ..report .pl { text-align: left; vertical-align: top; white-space: normal; width: 200px; white-space: normal; /* word-wrap: break-word; */ } ..report td.pl a.a { cursor: pointer; display: block; width: 200px; overflow: hidden; } ..report td.pl div.a { width: 200px; } ..report td.pl a:hover { background-color: #ffc; } /* Header rows... */ ..report tr.rh { background-color: #acf; color: black; font-weight: bold; } /* Calendars... */ ..report .rc { background-color: #f0f0f0; } /* Even rows... */ ..report .re, .report .reu { background-color: #def; } ..report .reu td { border-bottom: 1px solid black; } /* Odd rows... */ ..report .ro, .report .rou { background-color: white; } ..report .rou td { border-bottom: 1px solid black; } ..report .rou table td, .report .reu table td { border-bottom: 0px solid black; } /* styles for footnote marker */ ..report .fn { white-space: nowrap; } /* styles for numeric types */ ..report .num, .report .nump { text-align: right; white-space: nowrap; } ..report .nump { padding-left: 2em; } ..report .nump { padding: 0px 0.4em 0px 2em; } /* styles for text types */ ..report .text { text-align: left; white-space: normal; } ..report .text .big { margin-bottom: 1em; width: 17em; } ..report .text .more { display: none; } ..report .text .note { font-style: italic; font-weight: bold; } ..report .text .small { width: 10em; } ..report sup { font-style: italic; } ..report .outerFootnotes { font-size: 1em; } XML 13 FilingSummary.xml IDEA: XBRL DOCUMENT 3.22.2 html 1 22 1 false 0 0 false 0 false false R1.htm 000100 - Document - Document and Entity Information Sheet http://entegris.com/role/DocumentAndEntityInformation Document and Entity Information Cover 1 false false All Reports Book All Reports brhc10039042_8k.htm brhc10039042_ex99-1.htm entg-20220624.xsd entg-20220624_lab.xml entg-20220624_pre.xml image00001.jpg http://xbrl.sec.gov/dei/2021 true false JSON 15 MetaLinks.json IDEA: XBRL DOCUMENT { "instance": { "brhc10039042_8k.htm": { "axisCustom": 0, "axisStandard": 0, "contextCount": 1, "dts": { "inline": { "local": [ "brhc10039042_8k.htm" ] }, "labelLink": { "local": [ "entg-20220624_lab.xml" ] }, "presentationLink": { "local": [ "entg-20220624_pre.xml" ] }, "schema": { "local": [ "entg-20220624.xsd" ], "remote": [ "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd", "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd", "http://www.xbrl.org/2003/xl-2003-12-31.xsd", "http://www.xbrl.org/2003/xlink-2003-12-31.xsd", "http://www.xbrl.org/2004/ref-2004-08-10.xsd", "http://www.xbrl.org/2005/xbrldt-2005.xsd", "http://www.xbrl.org/2006/ref-2006-02-27.xsd", "http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd", "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd", "http://www.xbrl.org/lrr/role/net-2009-12-16.xsd", "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd", "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd", "https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd", "https://xbrl.fasb.org/srt/2021/elts/srt-roles-2021-01-31.xsd", "https://xbrl.fasb.org/srt/2021/elts/srt-types-2021-01-31.xsd", "https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd", "https://xbrl.fasb.org/us-gaap/2021/elts/us-roles-2021-01-31.xsd", "https://xbrl.fasb.org/us-gaap/2021/elts/us-types-2021-01-31.xsd", "https://xbrl.sec.gov/country/2021/country-2021.xsd", "https://xbrl.sec.gov/currency/2021/currency-2021.xsd", "https://xbrl.sec.gov/dei/2021/dei-2021.xsd", "https://xbrl.sec.gov/exch/2021/exch-2021.xsd", "https://xbrl.sec.gov/naics/2021/naics-2021.xsd", "https://xbrl.sec.gov/sic/2021/sic-2021.xsd", "https://xbrl.sec.gov/stpr/2021/stpr-2021.xsd" ] } }, "elementCount": 29, "entityCount": 1, "hidden": { "http://xbrl.sec.gov/dei/2021": 2, "total": 2 }, "keyCustom": 0, "keyStandard": 22, "memberCustom": 0, "memberStandard": 0, "nsprefix": "entg", "nsuri": "http://entegris.com/20220624", "report": { "R1": { "firstAnchor": { "ancestors": [ "div", "div", "div", "body", "html" ], "baseRef": "brhc10039042_8k.htm", "contextRef": "c20220624to20220624", "decimals": null, "first": true, "lang": "en-US", "name": "dei:DocumentType", "reportCount": 1, "unique": true, "unitRef": null, "xsiNil": "false" }, "groupType": "document", "isDefault": "true", "longName": "000100 - Document - Document and Entity Information", "role": "http://entegris.com/role/DocumentAndEntityInformation", "shortName": "Document and Entity Information", "subGroupType": "", "uniqueAnchor": { "ancestors": [ "div", "div", "div", "body", "html" ], "baseRef": "brhc10039042_8k.htm", "contextRef": "c20220624to20220624", "decimals": null, "first": true, "lang": "en-US", "name": "dei:DocumentType", "reportCount": 1, "unique": true, "unitRef": null, "xsiNil": "false" } } }, "segmentCount": 0, "tag": { "dei_AmendmentFlag": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.", "label": "Amendment Flag" } } }, "localname": "AmendmentFlag", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "booleanItemType" }, "dei_CityAreaCode": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Area code of city", "label": "City Area Code" } } }, "localname": "CityAreaCode", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_CoverAbstract": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Cover page.", "label": "Cover [Abstract]" } } }, "localname": "CoverAbstract", "nsuri": "http://xbrl.sec.gov/dei/2021", "xbrltype": "stringItemType" }, "dei_DocumentFiscalPeriodFocus": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Fiscal period values are FY, Q1, Q2, and Q3. 1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.", "label": "Document Fiscal Period Focus" } } }, "localname": "DocumentFiscalPeriodFocus", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "fiscalPeriodItemType" }, "dei_DocumentFiscalYearFocus": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.", "label": "Document Fiscal Year Focus" } } }, "localname": "DocumentFiscalYearFocus", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "gYearItemType" }, "dei_DocumentPeriodEndDate": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD.", "label": "Document Period End Date" } } }, "localname": "DocumentPeriodEndDate", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "dateItemType" }, "dei_DocumentType": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.", "label": "Document Type" } } }, "localname": "DocumentType", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "submissionTypeItemType" }, "dei_EntityAddressAddressLine1": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Address Line 1 such as Attn, Building Name, Street Name", "label": "Entity Address, Address Line One" } } }, "localname": "EntityAddressAddressLine1", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressAddressLine2": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Address Line 2 such as Street or Suite number", "label": "Entity Address, Address Line Two" } } }, "localname": "EntityAddressAddressLine2", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressAddressLine3": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Address Line 3 such as an Office Park", "label": "Entity Address, Address Line Three" } } }, "localname": "EntityAddressAddressLine3", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressCityOrTown": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Name of the City or Town", "label": "Entity Address, City or Town" } } }, "localname": "EntityAddressCityOrTown", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressCountry": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "ISO 3166-1 alpha-2 country code.", "label": "Entity Address, Country" } } }, "localname": "EntityAddressCountry", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "countryCodeItemType" }, "dei_EntityAddressPostalZipCode": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Code for the postal or zip code", "label": "Entity Address, Postal Zip Code" } } }, "localname": "EntityAddressPostalZipCode", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityAddressStateOrProvince": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Name of the state or province.", "label": "Entity Address, State or Province" } } }, "localname": "EntityAddressStateOrProvince", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "stateOrProvinceItemType" }, "dei_EntityCentralIndexKey": { "auth_ref": [ "r5" ], "lang": { "en-us": { "role": { "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.", "label": "Entity Central Index Key" } } }, "localname": "EntityCentralIndexKey", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "centralIndexKeyItemType" }, "dei_EntityEmergingGrowthCompany": { "auth_ref": [ "r5" ], "lang": { "en-us": { "role": { "documentation": "Indicate if registrant meets the emerging growth company criteria.", "label": "Entity Emerging Growth Company" } } }, "localname": "EntityEmergingGrowthCompany", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "booleanItemType" }, "dei_EntityFileNumber": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.", "label": "Entity File Number" } } }, "localname": "EntityFileNumber", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "fileNumberItemType" }, "dei_EntityIncorporationStateCountryCode": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Two-character EDGAR code representing the state or country of incorporation.", "label": "Entity Incorporation, State or Country Code" } } }, "localname": "EntityIncorporationStateCountryCode", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "edgarStateCountryItemType" }, "dei_EntityRegistrantName": { "auth_ref": [ "r5" ], "lang": { "en-us": { "role": { "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.", "label": "Entity Registrant Name" } } }, "localname": "EntityRegistrantName", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_EntityTaxIdentificationNumber": { "auth_ref": [ "r5" ], "lang": { "en-us": { "role": { "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.", "label": "Entity Tax Identification Number" } } }, "localname": "EntityTaxIdentificationNumber", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "employerIdItemType" }, "dei_LocalPhoneNumber": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Local phone number for entity.", "label": "Local Phone Number" } } }, "localname": "LocalPhoneNumber", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "normalizedStringItemType" }, "dei_NoTradingSymbolFlag": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true only for a security having no trading symbol.", "label": "No Trading Symbol Flag" } } }, "localname": "NoTradingSymbolFlag", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "booleanItemType" }, "dei_PreCommencementIssuerTenderOffer": { "auth_ref": [ "r2" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.", "label": "Pre-commencement Issuer Tender Offer" } } }, "localname": "PreCommencementIssuerTenderOffer", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "booleanItemType" }, "dei_PreCommencementTenderOffer": { "auth_ref": [ "r3" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.", "label": "Pre-commencement Tender Offer" } } }, "localname": "PreCommencementTenderOffer", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "booleanItemType" }, "dei_Security12bTitle": { "auth_ref": [ "r0" ], "lang": { "en-us": { "role": { "documentation": "Title of a 12(b) registered security.", "label": "Title of 12(b) Security" } } }, "localname": "Security12bTitle", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "securityTitleItemType" }, "dei_SecurityExchangeName": { "auth_ref": [ "r1" ], "lang": { "en-us": { "role": { "documentation": "Name of the Exchange on which a security is registered.", "label": "Security Exchange Name" } } }, "localname": "SecurityExchangeName", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "edgarExchangeCodeItemType" }, "dei_SolicitingMaterial": { "auth_ref": [ "r4" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.", "label": "Soliciting Material" } } }, "localname": "SolicitingMaterial", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "booleanItemType" }, "dei_TradingSymbol": { "auth_ref": [], "lang": { "en-us": { "role": { "documentation": "Trading symbol of an instrument as listed on an exchange.", "label": "Trading Symbol" } } }, "localname": "TradingSymbol", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "tradingSymbolItemType" }, "dei_WrittenCommunications": { "auth_ref": [ "r6" ], "lang": { "en-us": { "role": { "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.", "label": "Written Communications" } } }, "localname": "WrittenCommunications", "nsuri": "http://xbrl.sec.gov/dei/2021", "presentation": [ "http://entegris.com/role/DocumentAndEntityInformation" ], "xbrltype": "booleanItemType" } }, "unitCount": 0 } }, "std_ref": { "r0": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "b" }, "r1": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "d1-1" }, "r2": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "13e", "Subsection": "4c" }, "r3": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "14d", "Subsection": "2b" }, "r4": { "Name": "Exchange Act", "Number": "240", "Publisher": "SEC", "Section": "14a", "Subsection": "12" }, "r5": { "Name": "Regulation 12B", "Number": "240", "Publisher": "SEC", "Section": "12", "Subsection": "b-2" }, "r6": { "Name": "Securities Act", "Number": "230", "Publisher": "SEC", "Section": "425" } }, "version": "2.1" } ZIP 16 0001140361-22-024066-xbrl.zip IDEA: XBRL DOCUMENT begin 644 0001140361-22-024066-xbrl.zip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ś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