Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001101302-22-000052-index-headers.html | 2022-12-09 16:08:22 | |
| 0001101302-22-000052-index.html | 2022-12-09 16:08:22 | |
| 0001101302-22-000052.txt | 2022-12-09 16:08:22 | |
 0001101302-22-000052-xbrl.zip | 72443 | 2022-12-09 16:08:22 |
| entegris-bylaws.htm | 254588 | 2022-12-09 16:08:22 |
| entg-20221208.htm | 40126 | 2022-12-09 16:08:22 |
| entg-20221208.xsd | 1999 | 2022-12-09 16:08:22 |
 entg-20221208_g1.jpg | 42851 | 2022-12-09 16:08:22 |
| entg-20221208_htm.xml | 11365 | 2022-12-09 16:08:22 |
| entg-20221208_lab.xml | 25133 | 2022-12-09 16:08:22 |
| entg-20221208_pre.xml | 13136 | 2022-12-09 16:08:22 |
| FilingSummary.xml | 2020 | 2022-12-09 16:08:22 |
| Financial_Report.xlsx | 5735 | 2022-12-09 16:08:22 |
| MetaLinks.json | 17867 | 2022-12-09 16:08:22 |
| R1.htm | 39628 | 2022-12-09 16:08:22 |
| report.css | 2767 | 2022-12-09 16:08:22 |
| Show.js | 1085 | 2022-12-09 16:08:22 |