<SEC-DOCUMENT>0001101302-22-000052-index.html : 20221209
<SEC-HEADER>0001101302-22-000052.hdr.sgml : 20221209
<ACCEPTANCE-DATETIME>20221209160822
ACCESSION NUMBER:		0001101302-22-000052
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		14
CONFORMED PERIOD OF REPORT:	20221208
ITEM INFORMATION:		Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20221209
DATE AS OF CHANGE:		20221209

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ENTEGRIS INC
		CENTRAL INDEX KEY:			0001101302
		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
		IRS NUMBER:				411941551
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-32598
		FILM NUMBER:		221454851

	BUSINESS ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
		BUSINESS PHONE:		9784366500

	MAIL ADDRESS:	
		STREET 1:		129 CONCORD ROAD
		CITY:			BILLERICA
		STATE:			MA
		ZIP:			01821
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>entg-20221208.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: entg-20221208.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-3.1
<SEQUENCE>2
<FILENAME>entegris-bylaws.htm
<DESCRIPTION>EX-3.1
<TEXT>
Document 2 - file: entegris-bylaws.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>3
<FILENAME>entg-20221208.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT
<TEXT>
Document 3 - file: entg-20221208.xsd

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>4
<FILENAME>entg-20221208_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT
<TEXT>
Document 4 - file: entg-20221208_lab.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>5
<FILENAME>entg-20221208_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT
<TEXT>
Document 5 - file: entg-20221208_pre.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>entg-20221208_g1.jpg
<TEXT>
Document 6 - file: entg-20221208_g1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>7
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 7 - file: R1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>8
<FILENAME>entg-20221208_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 8 - file: entg-20221208_htm.html

Document 8 - RAW XML: entg-20221208_htm.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>9
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 9 - file: Financial_Report.xlsx

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>10
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 10 - file: Show.js

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>11
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 11 - file: report.css

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>12
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 12 - file: FilingSummary.html

Document 12 - RAW XML: FilingSummary.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>15
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 15 - file: MetaLinks.json

</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>16
<FILENAME>0001101302-22-000052-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 16 - file: 0001101302-22-000052-xbrl.zip

</DOCUMENT>
</SEC-DOCUMENT>