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| 0001101302-22-000024-index.html | 2022-04-26 16:40:20 | |
| 0001101302-22-000024.txt | 2022-04-26 16:40:20 | |
 0001101302-22-000024-xbrl.zip | 227061 | 2022-04-26 16:40:20 |
| entg-20220402.htm | 1267480 | 2022-04-26 16:40:20 |
| entg-20220402.xsd | 27713 | 2022-04-26 16:40:20 |
| entg-20220402_cal.xml | 70320 | 2022-04-26 16:40:20 |
| entg-20220402_def.xml | 189162 | 2022-04-26 16:40:20 |
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| entg-20220402_htm.xml | 953928 | 2022-04-26 16:40:20 |
| entg-20220402_lab.xml | 372912 | 2022-04-26 16:40:20 |
| entg-20220402_pre.xml | 273909 | 2022-04-26 16:40:20 |
| entg-202242xex311.htm | 9235 | 2022-04-26 16:40:20 |
| entg-202242xex312.htm | 9322 | 2022-04-26 16:40:20 |
| entg-202242xex321.htm | 5431 | 2022-04-26 16:40:20 |
| FilingSummary.xml | 27238 | 2022-04-26 16:40:20 |
| Financial_Report.xlsx | 60158 | 2022-04-26 16:40:20 |
| MetaLinks.json | 450880 | 2022-04-26 16:40:20 |
| R1.htm | 52364 | 2022-04-26 16:40:20 |
| R10.htm | 14198 | 2022-04-26 16:40:20 |
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| R28.htm | 8146 | 2022-04-26 16:40:20 |
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| R4.htm | 78000 | 2022-04-26 16:40:20 |
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| R8.htm | 94076 | 2022-04-26 16:40:20 |
| R9.htm | 9679 | 2022-04-26 16:40:20 |
| report.css | 2767 | 2022-04-26 16:40:20 |
| Show.js | 1085 | 2022-04-26 16:40:20 |