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| 0001101302-20-000048.txt | 2020-07-23 14:21:14 | |
 0001101302-20-000048-xbrl.zip | 352176 | 2020-07-23 14:21:14 |
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| entg-20200627_lab.xml | 453340 | 2020-07-23 14:21:14 |
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| entg-2020627xex321.htm | 7353 | 2020-07-23 14:21:14 |
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| Financial_Report.xlsx | 81650 | 2020-07-23 14:21:14 |
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| report.css | 2767 | 2020-07-23 14:21:14 |
| Show.js | 1085 | 2020-07-23 14:21:14 |