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| 0001104659-26-091697-index.html | 2026-08-06 08:41:25 | |
| 0001104659-26-091697.txt | 2026-08-06 08:41:25 | |
 0001104659-26-091697-xbrl.zip | 23174 | 2026-08-06 08:41:25 |
| acls-20260806.xsd | 3011 | 2026-08-06 08:41:25 |
| acls-20260806_lab.xml | 34239 | 2026-08-06 08:41:25 |
| acls-20260806_pre.xml | 22356 | 2026-08-06 08:41:25 |
| FilingSummary.xml | 1637 | 2026-08-06 08:41:25 |
| MetaLinks.json | 39179 | 2026-08-06 08:41:25 |
| R1.htm | 38074 | 2026-08-06 08:41:25 |
| report.css | 2766 | 2026-08-06 08:41:25 |
| Show.js | 1085 | 2026-08-06 08:41:25 |
| tm2622315d1_8k.htm | 25927 | 2026-08-06 08:41:25 |
| tm2622315d1_8k_htm.xml | 3095 | 2026-08-06 08:41:25 |
| tm2622315d1_ex99-1.htm | 199692 | 2026-08-06 08:41:25 |
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