Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-26-057147-index-headers.html | 2026-05-07 16:15:07 | |
| 0001104659-26-057147-index.html | 2026-05-07 16:15:07 | |
| 0001104659-26-057147.txt | 2026-05-07 16:15:07 | |
 0001104659-26-057147-xbrl.zip | 22671 | 2026-05-07 16:15:07 |
| acls-20260507.xsd | 3011 | 2026-05-07 16:15:07 |
| acls-20260507_lab.xml | 34239 | 2026-05-07 16:15:07 |
| acls-20260507_pre.xml | 22356 | 2026-05-07 16:15:07 |
| FilingSummary.xml | 1637 | 2026-05-07 16:15:07 |
| MetaLinks.json | 39179 | 2026-05-07 16:15:07 |
| R1.htm | 38072 | 2026-05-07 16:15:07 |
| report.css | 2766 | 2026-05-07 16:15:07 |
| Show.js | 1085 | 2026-05-07 16:15:07 |
| tm2613844d1_8k.htm | 25709 | 2026-05-07 16:15:07 |
| tm2613844d1_8k_htm.xml | 3095 | 2026-05-07 16:15:07 |
| tm2613844d1_ex99-1.htm | 183450 | 2026-05-07 16:15:07 |
 tm2613844d1_ex99-1img01.jpg | 5756 | 2026-05-07 16:15:07 |