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|---|---|---|
 0001104659-26-056230-index-headers.html | 2026-05-06 16:01:57 | |
| 0001104659-26-056230-index.html | 2026-05-06 16:01:57 | |
| 0001104659-26-056230.txt | 2026-05-06 16:01:57 | |
 0001104659-26-056230-xbrl.zip | 12157 | 2026-05-06 16:01:57 |
| acls-20260505.xsd | 3011 | 2026-05-06 16:01:57 |
| acls-20260505_lab.xml | 34239 | 2026-05-06 16:01:57 |
| acls-20260505_pre.xml | 22356 | 2026-05-06 16:01:57 |
| FilingSummary.xml | 1637 | 2026-05-06 16:01:57 |
| MetaLinks.json | 39179 | 2026-05-06 16:01:57 |
| R1.htm | 38062 | 2026-05-06 16:01:57 |
| report.css | 2766 | 2026-05-06 16:01:57 |
| Show.js | 1084 | 2026-05-06 16:01:57 |
| tm2613755d1_8k.htm | 55314 | 2026-05-06 16:01:57 |
| tm2613755d1_8k_htm.xml | 3085 | 2026-05-06 16:01:57 |