Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-26-027104-index-headers.html | 2026-03-12 16:36:16 | |
| 0001104659-26-027104-index.html | 2026-03-12 16:36:16 | |
| 0001104659-26-027104.txt | 2026-03-12 16:36:16 | |
 0001104659-26-027104-xbrl.zip | 14612 | 2026-03-12 16:36:16 |
| acls-20260310.xsd | 3011 | 2026-03-12 16:36:16 |
| acls-20260310_lab.xml | 34239 | 2026-03-12 16:36:16 |
| acls-20260310_pre.xml | 22356 | 2026-03-12 16:36:16 |
| FilingSummary.xml | 1634 | 2026-03-12 16:36:16 |
| MetaLinks.json | 39175 | 2026-03-12 16:36:16 |
| R1.htm | 38062 | 2026-03-12 16:36:16 |
| report.css | 2767 | 2026-03-12 16:36:16 |
| Show.js | 1084 | 2026-03-12 16:36:16 |
| tm268674d1_8k.htm | 28368 | 2026-03-12 16:36:16 |
| tm268674d1_8k_htm.xml | 3084 | 2026-03-12 16:36:16 |
| tm268674d1_ex99-1.htm | 14197 | 2026-03-12 16:36:16 |
 tm268674d1_ex99-1img01.jpg | 8395 | 2026-03-12 16:36:16 |