Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-26-020461-index-headers.html | 2026-02-26 15:48:26 | |
| 0001104659-26-020461-index.html | 2026-02-26 15:48:26 | |
| 0001104659-26-020461.txt | 2026-02-26 15:48:26 | |
 0001104659-26-020461-xbrl.zip | 388016 | 2026-02-26 15:48:26 |
| acls-20251231.xsd | 77726 | 2026-02-26 15:48:26 |
| acls-20251231x10k.htm | 3058607 | 2026-02-26 15:48:26 |
| acls-20251231x10k_htm.xml | 2996404 | 2026-02-26 15:48:26 |
| acls-20251231xex10d1.htm | 81135 | 2026-02-26 15:48:26 |
| acls-20251231xex10d7.htm | 26757 | 2026-02-26 15:48:26 |
| acls-20251231xex10d8.htm | 14443 | 2026-02-26 15:48:26 |
| acls-20251231xex14d1.htm | 35697 | 2026-02-26 15:48:26 |
 acls-20251231xex14d1001.jpg | 8873 | 2026-02-26 15:48:26 |
| acls-20251231xex21d1.htm | 7218 | 2026-02-26 15:48:26 |
| acls-20251231xex23d1.htm | 7276 | 2026-02-26 15:48:26 |
| acls-20251231xex31d1.htm | 13159 | 2026-02-26 15:48:26 |
| acls-20251231xex31d2.htm | 14184 | 2026-02-26 15:48:26 |
| acls-20251231xex32d1.htm | 6141 | 2026-02-26 15:48:26 |
| acls-20251231xex32d2.htm | 7481 | 2026-02-26 15:48:26 |
| acls-20251231_cal.xml | 127074 | 2026-02-26 15:48:26 |
| acls-20251231_def.xml | 306993 | 2026-02-26 15:48:26 |
| acls-20251231_lab.xml | 757935 | 2026-02-26 15:48:26 |
| acls-20251231_pre.xml | 557040 | 2026-02-26 15:48:26 |
| FilingSummary.xml | 57878 | 2026-02-26 15:48:26 |
| MetaLinks.json | 1305419 | 2026-02-26 15:48:26 |
| R1.htm | 70613 | 2026-02-26 15:48:26 |
| R10.htm | 76878 | 2026-02-26 15:48:26 |
| R11.htm | 16900 | 2026-02-26 15:48:26 |
| R12.htm | 37563 | 2026-02-26 15:48:26 |
| R13.htm | 22377 | 2026-02-26 15:48:26 |
| R14.htm | 24536 | 2026-02-26 15:48:26 |
| R15.htm | 22351 | 2026-02-26 15:48:26 |
| R16.htm | 189272 | 2026-02-26 15:48:26 |
| R17.htm | 42527 | 2026-02-26 15:48:26 |
| R18.htm | 12220 | 2026-02-26 15:48:26 |
| R19.htm | 25213 | 2026-02-26 15:48:26 |
| R2.htm | 111411 | 2026-02-26 15:48:26 |
| R20.htm | 38807 | 2026-02-26 15:48:26 |
| R21.htm | 9850 | 2026-02-26 15:48:26 |
| R22.htm | 96049 | 2026-02-26 15:48:26 |
| R23.htm | 8837 | 2026-02-26 15:48:26 |
| R24.htm | 103925 | 2026-02-26 15:48:26 |
| R25.htm | 315497 | 2026-02-26 15:48:26 |
| R26.htm | 18292 | 2026-02-26 15:48:26 |
| R27.htm | 48733 | 2026-02-26 15:48:26 |
| R28.htm | 17876 | 2026-02-26 15:48:26 |
| R29.htm | 9480 | 2026-02-26 15:48:26 |
| R3.htm | 38109 | 2026-02-26 15:48:26 |
| R30.htm | 4371 | 2026-02-26 15:48:26 |
| R31.htm | 44095 | 2026-02-26 15:48:26 |
| R32.htm | 170832 | 2026-02-26 15:48:26 |
| R33.htm | 70318 | 2026-02-26 15:48:26 |
| R34.htm | 69791 | 2026-02-26 15:48:26 |
| R35.htm | 16096 | 2026-02-26 15:48:26 |
| R36.htm | 35293 | 2026-02-26 15:48:26 |
| R37.htm | 20597 | 2026-02-26 15:48:26 |
| R38.htm | 22882 | 2026-02-26 15:48:26 |
| R39.htm | 20841 | 2026-02-26 15:48:26 |
| R4.htm | 123836 | 2026-02-26 15:48:26 |
| R40.htm | 189889 | 2026-02-26 15:48:26 |
| R41.htm | 40181 | 2026-02-26 15:48:26 |
| R42.htm | 19000 | 2026-02-26 15:48:26 |
| R43.htm | 22492 | 2026-02-26 15:48:26 |
| R44.htm | 84720 | 2026-02-26 15:48:26 |
| R45.htm | 97733 | 2026-02-26 15:48:26 |
| R46.htm | 315479 | 2026-02-26 15:48:26 |
| R47.htm | 37198 | 2026-02-26 15:48:26 |
| R48.htm | 30079 | 2026-02-26 15:48:26 |
| R49.htm | 27931 | 2026-02-26 15:48:26 |
| R5.htm | 12022 | 2026-02-26 15:48:26 |
| R50.htm | 13167 | 2026-02-26 15:48:26 |
| R51.htm | 48162 | 2026-02-26 15:48:26 |
| R52.htm | 21752 | 2026-02-26 15:48:26 |
| R53.htm | 21942 | 2026-02-26 15:48:26 |
| R54.htm | 11335 | 2026-02-26 15:48:26 |
| R55.htm | 31976 | 2026-02-26 15:48:26 |
| R56.htm | 18707 | 2026-02-26 15:48:26 |
| R57.htm | 11462 | 2026-02-26 15:48:26 |
| R58.htm | 9580 | 2026-02-26 15:48:26 |
| R59.htm | 11831 | 2026-02-26 15:48:26 |
| R6.htm | 76967 | 2026-02-26 15:48:26 |
| R60.htm | 12299 | 2026-02-26 15:48:26 |
| R61.htm | 21793 | 2026-02-26 15:48:26 |
| R62.htm | 22349 | 2026-02-26 15:48:26 |
| R63.htm | 10001 | 2026-02-26 15:48:26 |
| R64.htm | 35808 | 2026-02-26 15:48:26 |
| R65.htm | 23354 | 2026-02-26 15:48:26 |
| R66.htm | 87134 | 2026-02-26 15:48:26 |
| R67.htm | 11439 | 2026-02-26 15:48:26 |
| R68.htm | 22729 | 2026-02-26 15:48:26 |
| R69.htm | 25638 | 2026-02-26 15:48:26 |
| R7.htm | 96496 | 2026-02-26 15:48:26 |
| R70.htm | 14024 | 2026-02-26 15:48:26 |
| R71.htm | 11142 | 2026-02-26 15:48:26 |
| R72.htm | 49299 | 2026-02-26 15:48:26 |
| R73.htm | 21709 | 2026-02-26 15:48:26 |
| R74.htm | 8836 | 2026-02-26 15:48:26 |
| R75.htm | 28646 | 2026-02-26 15:48:26 |
| R76.htm | 25889 | 2026-02-26 15:48:26 |
| R77.htm | 7922 | 2026-02-26 15:48:26 |
| R78.htm | 35842 | 2026-02-26 15:48:26 |
| R79.htm | 18102 | 2026-02-26 15:48:26 |
| R8.htm | 6695 | 2026-02-26 15:48:26 |
| R80.htm | 6468 | 2026-02-26 15:48:26 |
| R81.htm | 4907 | 2026-02-26 15:48:26 |
| R82.htm | 59146 | 2026-02-26 15:48:26 |
| R83.htm | 18176 | 2026-02-26 15:48:26 |
| R84.htm | 30850 | 2026-02-26 15:48:26 |
| R85.htm | 14106 | 2026-02-26 15:48:26 |
| R86.htm | 31207 | 2026-02-26 15:48:26 |
| R87.htm | 115713 | 2026-02-26 15:48:26 |
| R88.htm | 23253 | 2026-02-26 15:48:26 |
| R89.htm | 46426 | 2026-02-26 15:48:26 |
| R9.htm | 128044 | 2026-02-26 15:48:26 |
| R90.htm | 24384 | 2026-02-26 15:48:26 |
| R91.htm | 14396 | 2026-02-26 15:48:26 |
| R92.htm | 28994 | 2026-02-26 15:48:26 |
| R93.htm | 15075 | 2026-02-26 15:48:26 |
| report.css | 2768 | 2026-02-26 15:48:26 |
| Show.js | 1086 | 2026-02-26 15:48:26 |