Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-26-016391-index-headers.html | 2026-02-17 16:06:16 | |
| 0001104659-26-016391-index.html | 2026-02-17 16:06:16 | |
| 0001104659-26-016391.txt | 2026-02-17 16:06:16 | |
 0001104659-26-016391-xbrl.zip | 25862 | 2026-02-17 16:06:16 |
| acls-20260217.xsd | 3011 | 2026-02-17 16:06:16 |
| acls-20260217_lab.xml | 34239 | 2026-02-17 16:06:16 |
| acls-20260217_pre.xml | 22356 | 2026-02-17 16:06:16 |
| FilingSummary.xml | 1634 | 2026-02-17 16:06:16 |
| MetaLinks.json | 39175 | 2026-02-17 16:06:16 |
| R1.htm | 38073 | 2026-02-17 16:06:16 |
| report.css | 2767 | 2026-02-17 16:06:16 |
| Show.js | 1084 | 2026-02-17 16:06:16 |
| tm265450d5_8k.htm | 26063 | 2026-02-17 16:06:16 |
| tm265450d5_8k_htm.xml | 3095 | 2026-02-17 16:06:16 |
| tm265450d5_ex99-1.htm | 250491 | 2026-02-17 16:06:16 |
 tm265450d5_ex99-1img001.jpg | 2472 | 2026-02-17 16:06:16 |