Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-26-011577-index-headers.html | 2026-02-06 16:40:36 | |
| 0001104659-26-011577-index.html | 2026-02-06 16:40:36 | |
| 0001104659-26-011577.txt | 2026-02-06 16:40:36 | |
 0001104659-26-011577-xbrl.zip | 20093 | 2026-02-06 16:40:36 |
| acls-20260206.xsd | 3011 | 2026-02-06 16:40:36 |
| acls-20260206_lab.xml | 34239 | 2026-02-06 16:40:36 |
| acls-20260206_pre.xml | 22356 | 2026-02-06 16:40:36 |
| FilingSummary.xml | 1634 | 2026-02-06 16:40:36 |
| MetaLinks.json | 39175 | 2026-02-06 16:40:36 |
| R1.htm | 38066 | 2026-02-06 16:40:36 |
| report.css | 2766 | 2026-02-06 16:40:36 |
| Show.js | 1084 | 2026-02-06 16:40:36 |
| tm265450d1_8k.htm | 47202 | 2026-02-06 16:40:36 |
| tm265450d1_8k_htm.xml | 3087 | 2026-02-06 16:40:36 |
| tm265450d1_ex99-1.htm | 15937 | 2026-02-06 16:40:36 |