Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-26-007482-index-headers.html | 2026-01-28 17:18:14 | |
| 0001104659-26-007482-index.html | 2026-01-28 17:18:14 | |
| 0001104659-26-007482.txt | 2026-01-28 17:18:14 | |
 0001104659-26-007482-xbrl.zip | 25997 | 2026-01-28 17:18:14 |
| acls-20260128.xsd | 3011 | 2026-01-28 17:18:14 |
| acls-20260128_lab.xml | 34239 | 2026-01-28 17:18:14 |
| acls-20260128_pre.xml | 22356 | 2026-01-28 17:18:14 |
| FilingSummary.xml | 1634 | 2026-01-28 17:18:14 |
| MetaLinks.json | 39175 | 2026-01-28 17:18:14 |
| R1.htm | 38061 | 2026-01-28 17:18:14 |
| report.css | 2766 | 2026-01-28 17:18:14 |
| Show.js | 1084 | 2026-01-28 17:18:14 |
| tm264112d1_8k.htm | 145404 | 2026-01-28 17:18:14 |
| tm264112d1_8k_htm.xml | 3083 | 2026-01-28 17:18:14 |