Parent Directory| Name | Size | Last Modified |
|---|---|---|
 0001104659-25-119351-index-headers.html | 2025-12-08 17:08:58 | |
| 0001104659-25-119351-index.html | 2025-12-08 17:08:58 | |
| 0001104659-25-119351.txt | 2025-12-08 17:08:58 | |
 0001104659-25-119351-xbrl.zip | 4236 | 2025-12-08 17:08:58 |
| FilingSummary.xml | 2597 | 2025-12-08 17:08:58 |
 lg_axcelis-4c.jpg | 18819 | 2025-12-08 17:08:58 |
 lg_ubs-4c.jpg | 13761 | 2025-12-08 17:08:58 |
 lg_veeco-4c.jpg | 12246 | 2025-12-08 17:08:58 |
 lg_veecomaterial-4clr.jpg | 19039 | 2025-12-08 17:08:58 |
| MetaLinks.json | 62856 | 2025-12-08 17:08:58 |
| R1.htm | 13390 | 2025-12-08 17:08:58 |
| R2.htm | 28395 | 2025-12-08 17:08:58 |
| R3.htm | 9335 | 2025-12-08 17:08:58 |
| report.css | 2767 | 2025-12-08 17:08:58 |
| Show.js | 1085 | 2025-12-08 17:08:58 |
| tm2532715-1_s4.htm | 4498306 | 2025-12-08 17:08:58 |
| tm2532715d1_ex-filingfees.htm | 29379 | 2025-12-08 17:08:58 |
| tm2532715d1_ex-filingfees_htm.xml | 7437 | 2025-12-08 17:08:58 |
| tm2532715d2_ex23-1.htm | 2180 | 2025-12-08 17:08:58 |
| tm2532715d2_ex23-2.htm | 3302 | 2025-12-08 17:08:58 |
 tm2532715d2_ex23-3img001.jpg | 2503 | 2025-12-08 17:08:58 |
 tm2532715d2_ex23-3img002.jpg | 1942 | 2025-12-08 17:08:58 |
| tm2532715d2_ex99-1.htm | 3987 | 2025-12-08 17:08:58 |
| tm2532715d2_ex99-2.htm | 3673 | 2025-12-08 17:08:58 |